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GRH6002 Dry Claw Vacuum Pump 6000 m³/h Ultra-High-Capacity Oil-Free Vacuum Pump for Semiconductor Process
GRH6002 Dry Claw Vacuum Pump 6000 m³/h Ultra-High-Capacity Oil-Free Vacuum Pump for Semiconductor Process
Specifications
Ultimate Pressure :
≤0.5 Pa
Noise :
≤70 dB(A)
Model Number :
GRH6001
Outlet :
KF40
Weight :
846 kg
N2 Purge :
0.2-0.6 MPa, 43/97/123 L/min
Inlet :
ISO250
Dimensions :
1076×516×988 mm
MOQ :
1 Set
Price :
Negotiable
Cooling Water :
0.1-0.6 MPa, 11 L/min
Place of Origin :
China
Motor Power :
11+7.5 kW
Certification :
ISO9001,ISO14001,ISO45001
Delivery Time :
25-40 Working Days
Voltage :
380V/3-Phase
Payment Terms :
T/T
Brand Name :
Baosi
Pumping Speed :
6000 m³/h
Supply Ability :
20 Sets/Month
Packaging Details :
Export Standard Wooden Case Packaging
Description

GRH6002 Dry Claw Vacuum Pump — 6000 m³/h Ultra-High-Capacity Solution

The GRH6001 is the flagship model of the GRH series, delivering an impressive 6000 m³/h pumping speed with ultimate pressure ≤0.5 Pa. Featuring an ISO250 inlet, 11+7.5 kW dual motor configuration, and robust 846 kg industrial construction, it is engineered for the most demanding large-scale semiconductor, photovoltaic, and lithium battery manufacturing facilities.

Key Features

  • Ultra-High Capacity: 6000 m³/h pumping speed — the most powerful GRH series model
  • Oil-Free Claw Technology: No oil contamination risk for sensitive semiconductor processes
  • Dual Motor System: 11+7.5 kW permanent magnet synchronous motors
  • ISO250 Large Inlet: Handles high-volume gas flow for large-scale production lines
  • Superior Dust Handling: Advanced claw rotor design for harsh environments
  • Industrial-Grade Build: 846 kg robust construction with 1076*516*988 mm footprint
  • Low Noise: ≤70 dB(A) despite high pumping capacity
  • Advanced Sealing: Triple-layer protection: lip seal + labyrinth + nitrogen purge
  • Remote Intelligence: I/O + RS485 (Modbus) for full factory integration

Technical Specifications

Model GRH6002
Pumping Speed 6000 m³/h
Ultimate Pressure ≤0.5 Pa
Motor Power 11 + 7.5 kW
Voltage 380V (3-Phase)
Inlet Connection ISO250
Outlet Connection KF40
Noise Level ≤70 dB(A)
Weight 846 kg
Dimensions (L*W*H) 1076 * 516 * 988 mm
Cooling Water Pressure 0.1–0.6 MPa
Cooling Water Flow 11 L/min
N₂ Purge Pressure 0.2–0.6 MPa
N₂ Purge Flow 43/97/123 L/min
Operating Temperature 5–40°C; ≤90% RH

Applications

  • Large-Scale Semiconductor: High-volume etch, ion implantation, CVD processes
  • Photovoltaic Mega-Factories: Crystal growth and cell manufacturing at scale
  • Lithium Battery Gigafactories: Cell drying, electrolyte filling, degassing
  • Flat Panel Display Manufacturing: LCD, LED, OLED production lines
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GRH6002 Dry Claw Vacuum Pump 6000 m³/h Ultra-High-Capacity Oil-Free Vacuum Pump for Semiconductor Process

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Product Detail
Ultimate Pressure :
≤0.5 Pa
Noise :
≤70 dB(A)
Model Number :
GRH6001
Outlet :
KF40
Weight :
846 kg
N2 Purge :
0.2-0.6 MPa, 43/97/123 L/min
Contact Supplier
GRH6002 Dry Claw Vacuum Pump 6000 m³/h Ultra-High-Capacity Oil-Free Vacuum Pump for Semiconductor Process

Ningbo Baosi Energy Equipment Co., Ltd.

Verified Supplier
9 Years
zhejiang, ningbo
Since 2005
Business Type :
Manufacturer, Importer, Exporter
Main Products :
Rotary Vane Vacuum Pump, DRV series Two-Stage Oil Rotary Vane Vacuum Pump, Scroll Vacuum Pump
Total Annual :
200000000-300000000
Employee Number :
1500~2200
Certification Level :
Verified Supplier
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