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GRM4201 Large Multi-Stage Roots Dry Vacuum Pump 4200 m³/h Oil-Free for Load-Lock Transfer
GRM4201 Large Multi-Stage Roots Dry Vacuum Pump 4200 m³/h Oil-Free for Load-Lock Transfer
Specifications
Brand Name :
Baosi
Price :
USD 22000-35000/Set
Noise :
≤75 dB(A)
Certification :
CE
Model Number :
GRM4201
Pumping Speed :
4200 m³/h
Packaging Details :
Export Standard Wooden Case Packaging
Ultimate Pressure :
≤0.5 Pa
Supply Ability :
15 Sets/Month
Weight :
1400 kg
MOQ :
1 Set
Delivery Time :
30-45 Working Days
Place of Origin :
China
Payment Terms :
T/T,L/C
Inlet :
ISO160
Dimensions :
1695×600×1450 mm (main) + 295×600×1450 mm (booster)
Description
GRM4201 Large Multi-Stage Roots Dry Vacuum Pump — 4200 m³/h High-Capacity Solution

The GRM4201 is a large-scale multi-stage roots dry vacuum pump specifically designed for Load-Lock chambers, transfer chambers, and fast pump-down applications. With 4200 m³/h pumping speed and 13+10 kW dual motor configuration, it meets the demands of heterojunction solar cell manufacturing and lithium battery gigafactories where rapid cycling and high vacuum integrity are critical.

Key Features
  • Ultra-High Capacity: 4200 m³/h for rapid Load-Lock pump-down cycles
  • Multi-Stage Roots + Booster: High vacuum with wide working pressure range
  • Powerful Dual Motor: 13+10 kW permanent magnet synchronous motors
  • Unique Rotor Design: Optimized for low energy consumption with high efficiency
  • Oil-Free Clean Vacuum: No oil contamination — ideal for semiconductor and solar
  • Precision Manufacturing: Advanced CNC-machined rotors with full interchangeability
  • Dual-End Bearing Support: Ultra-reliable rotor support with minimal vibration
  • Superior Start-Up Reliability: Engineered for demanding process cycling
  • Advanced Sealing: Lip seal + labyrinth oil barrier + nitrogen purge — truly oil-free
  • Water-Cooled Sealed Motor: Eliminates oil leak risk, extends service life
  • Intelligent Control: One-touch start/stop with I/O and RS485 (Modbus-RTU)
Technical Specifications
Model GRM4201
Pumping Speed 4200 m³/h
Ultimate Pressure (w/o purge) ≤0.5 Pa
Motor Power 13 + 10 kW
Voltage 380V (3-Phase)
Inlet Connection ISO160
Outlet Connection KF50
Noise Level (with silencer) ≤75 dB(A)
Weight 1400 kg (main pump)
Dimensions — Main Pump (L*W*H) 1695 * 600 * 1450 mm
Dimensions — Booster (L*W*H) 295 * 600 * 1450 mm
Cooling Water Pressure 0.1–0.7 MPa
Cooling Water Flow 8–10 L/min
N₂ Purge Pressure 0.2–0.5 MPa
N₂ Purge Flow 0–120 L/min
Operating Temperature 5–40°C; ≤80% RH
Applications
  • Semiconductor Manufacturing: Load-Lock chambers, transfer modules, process interfaces
  • Heterojunction (HJT) Solar Cell: PECVD vacuum, rapid pump-down
  • Lithium Battery Gigafactories: High-volume cell drying and vacuum processing
  • Vacuum Coating: Load-Lock for substrate transfer while maintaining chamber vacuum
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GRM4201 Large Multi-Stage Roots Dry Vacuum Pump 4200 m³/h Oil-Free for Load-Lock Transfer

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Product Detail
Brand Name :
Baosi
Price :
USD 22000-35000/Set
Noise :
≤75 dB(A)
Certification :
CE
Model Number :
GRM4201
Pumping Speed :
4200 m³/h
Contact Supplier
GRM4201 Large Multi-Stage Roots Dry Vacuum Pump 4200 m³/h Oil-Free for Load-Lock Transfer

Ningbo Baosi Energy Equipment Co., Ltd.

Verified Supplier
9 Years
zhejiang, ningbo
Since 2005
Business Type :
Manufacturer, Importer, Exporter
Main Products :
Rotary Vane Vacuum Pump, DRV series Two-Stage Oil Rotary Vane Vacuum Pump, Scroll Vacuum Pump
Total Annual :
200000000-300000000
Employee Number :
1500~2200
Certification Level :
Verified Supplier
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