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GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process
GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process
Specifications
Ultimate Pressure :
≤0.5 Pa
Pumping Speed :
3000 m³/h
Inlet :
ISO160
Dimensions :
922×516×988 mm
Noise :
≤70 dB(A)
Weight :
770 kg
N2 Purge :
0.2-0.6 MPa, 43/97/123 L/min
Delivery Time :
20-35 Working Days
Outlet :
KF40
Brand Name :
Baosi
Certification :
CE
Voltage :
380V/3-Phase
MOQ :
1 Set
Model Number :
GRH3001
Place of Origin :
China
Motor Power :
11+7.5 kW
Price :
USD 12800-18500/Set
Packaging Details :
Export Standard Wooden Case Packaging
Payment Terms :
T/T,L/C
Cooling Water :
0.1-0.6 MPa, 11 L/min
Supply Ability :
30 Sets/Month
Description
GRH3001 Dry Claw Vacuum Pump 3000 m³/h High-Capacity Oil-Free Vacuum Pump for Semiconductor Industrial Process
GRH3001 Dry Claw Vacuum Pump — 3000 m³/h High-Capacity Oil-Free Solution

The GRH3001 is a high-capacity dry claw vacuum pump delivering 3000 m³/h pumping speed with ultimate pressure ≤0.5 Pa. With a powerful 11+7.5 kW dual motor configuration, it handles the most demanding semiconductor, photovoltaic, and lithium battery manufacturing processes while maintaining contamination-free operation.

Key Features
  • High-Capacity Oil-Free Design: 3000 m³/h pumping speed with zero oil contamination risk
  • Dual Motor System: 11+7.5 kW permanent magnet synchronous motors for maximum efficiency
  • Advanced Claw Rotor: Superior dust handling and long service life in harsh environments
  • Dust & Vapor Tolerant: Insensitive to particulates and water vapor in process gases
  • Compact Integration: 922 * 516 * 988 mm footprint with 770 kg robust construction
  • Comprehensive Protection: Full safety and monitoring features with adaptive control
  • Low Noise Operation: ≤70 dB(A) for comfortable working environments
  • Multi-Layer Sealing: Lip seal + labyrinth seal + nitrogen purge for guaranteed oil-free vacuum
  • Smart Connectivity: I/O and RS485 (Modbus protocol) remote monitoring and control
Technical Specifications
Model GRH3001
Pumping Speed 3000 m³/h
Ultimate Pressure ≤0.5 Pa
Motor Power 11 + 7.5 kW
Voltage 380V (3-Phase)
Inlet Connection ISO160
Outlet Connection KF40
Noise Level ≤70 dB(A)
Weight 770 kg
Dimensions (L*W*H) 922 * 516 * 988 mm
Cooling Water Pressure 0.1–0.6 MPa
Cooling Water Flow 11 L/min
N₂ Purge Pressure 0.2–0.6 MPa
N₂ Purge Flow 43/97/123 L/min
Operating Temperature 5–40°C; ≤90% RH
Applications
  • Semiconductor: Etch, Ion Implantation, CVD (ALD, LPCVD, PECVD, MOCVD, SACVD, RTP, HDP-CVD)
  • Photovoltaic: Crystal growth, solar cell manufacturing processes
  • Lithium Battery: Cell vacuum drying, electrolyte filling, degassing processes
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GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process

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Product Detail
Ultimate Pressure :
≤0.5 Pa
Pumping Speed :
3000 m³/h
Inlet :
ISO160
Dimensions :
922×516×988 mm
Noise :
≤70 dB(A)
Weight :
770 kg
Contact Supplier
GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process

Ningbo Baosi Energy Equipment Co., Ltd.

Verified Supplier
9 Years
zhejiang, ningbo
Since 2005
Business Type :
Manufacturer, Importer, Exporter
Main Products :
Rotary Vane Vacuum Pump, DRV series Two-Stage Oil Rotary Vane Vacuum Pump, Scroll Vacuum Pump
Total Annual :
200000000-300000000
Employee Number :
1500~2200
Certification Level :
Verified Supplier
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