1. Equipment Name and Model:
SXL64-17NH High-temperature Atmosphere Box Furnace
2. Application Field:
It is mainly used for the high-temperature co-firing process of alumina substrates and metal pastes (HTCC) in a nitrogen-hydrogen atmosphere.
3. Technical Indicators and Basic Configuration
3.1 Rated Temperature: 1600°C;
3.2 Maximum Temperature: 1700°C;
3.3 Effective Dimensions: 400×400×400mm (Width×Height×Depth);
3.4 Heating Element: U-shaped molybdenum wire;
3.5 Process Atmosphere: Nitrogen/hydrogen, with a humidification function;
3.6 Temperature Control Stability: ±1°C, with a PID parameter self-tuning function;
3.7 Temperature Uniformity: Better than ±3°C (Tested in an empty furnace at a constant temperature of 1600°C for 2 hours);
3.8 Temperature Control Thermocouple: B graduation;
3.9 Number of Temperature Control Points: 1;
3.10 Number of Temperature Control Segments: 4×10 segments;
3.11 Exhaust Chimney: One exhaust port, equipped with an ignition device;
3.12 Alarm and Protection: Acoustic and optical alarm protection for over-temperature, broken thermocouple, etc., and it has the function of over-temperature alarm and power-off protection;
3.13 Maximum Heating-up Power: 25kW;
3.14 Insulation Power of the Empty Furnace: ≤15kW;
3.15 Heating-up Rate: RT~1000°C ≤ 5°C/min, 1000~1600°C ≤ 2°C/min;
3.16 Surface Temperature Rise: < 35°C;
3.17 Equipment Weight: Approximately 960 Kg;
3.18 Reference Dimensions of the Appearance: 1200×1950×1250mm (Width×Height×Depth), subject to the final product;
3.19 Appearance Color: Light gray;
3.20 Remarks: The equipment reserves the air intake pipelines for oxygen/compressed air, and the flow measurement range is 5~50L/min.
IV. General Technical Description
The equipment is mainly composed of the outer shell, the sealed furnace body, the furnace chamber, the vacuum atmosphere system and the temperature control system.
Figure 1 Schematic Diagram of the Furnace Chamber