Semiconductor ultrapure water equipment is used for cleaning components during semiconductor manufacturing and must meet specific water quality standards. The output water quality of semiconductor ultrapure water systems must comply with the ASTM (American Society for Testing and Materials) standards for pure water, China's electronic industry standards for electronic-grade water (18 MΩ·cm, 15 MΩ·cm, 10 MΩ·cm, 2 MΩ·cm, 0.5 MΩ·cm), water quality requirements for the semiconductor industry, and integrated circuit water quality standards.
Standard Configuration:
Raw Water → Raw Water Tank → Booster Pump → Flocculant/Reducer Dosing → Activated Carbon Filter → Ultrafiltration (UF) → Scale Inhibitor Dosing → Security Filter → 1st Stage High-Pressure Pump → 1st Stage RO → pH Adjustment → Intermediate Tank → 2nd Stage High-Pressure Pump → 2nd Stage RO → Purified Water Tank → EDI Booster Pump → UV Sterilizer → Cartridge Filter → EDI System → Ultra-Pure Water Tank → Transfer Pump → TOC Removal Unit → Polishing Resin → Final Filter → Point of Use
- Multi-Stage Pretreatment: Removes particles, organics, and chlorine to protect RO membranes.
- Dual RO System: Achieves salt rejection rate for consistent high-purity water.
- EDI Technology: Continuous electro-deionization eliminates the need for chemical regeneration.
- Polishing Resin: Final purification stage for ultralow TOC and ionic contaminants
IV.Specifications
Item | Specification |
Electricity Supply | 380V |
Produced Water Quality | Resistivity ≥15-18.25 MΩ·cm |
Core Technology | Double-pass Reverse Osmosis + EDI + Polishing Resin |
Key Components | RO Membrane Modules, EDI Units |
Operation Mode | Full Automatic (PLC-controlled) |
Product Features | Stable Water Quality,Low Operation Cost,Reliable Performance |
After-Sales Service | 2-Year Warranty For Standard Equipment |
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Fully Automated Control:
- Automatic backwash and regeneration cycles.
- Manual override option for maintenance.
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Factory-Integrated Wiring:
- Pre-wired components reduce on-site installation time .
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Advanced Maintenance Features:
- RO chemical cleaning system extends membrane life.
- Recirculation loops ensure water quality stability.
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Premium Materials:
- 304 stainless steel and UPVC piping for corrosion resistance.
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Intuitive Operation:
- Integrated control panel with real-time monitoring.
- Remote access option for troubleshooting.
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Low Maintenance:
- Durable components designed for continuous operation.
- Custom Engineering: Based on your detailed water analysis report.
- Industry Certifications:
- NB/T 10790-2021 (Technical Specifications for Water Treatment Equipment)
- GB/T 19249-2017 (Reverse Osmosis Water Treatment Equipment)
- IEC 439-1 (Low Voltage Switchgear and Controlgear Assemblies)
- GB 6682-2008 (Laboratory Ultra-Pure Water Standards)
- GB/T 11446.1-2013 (Electronic Grade Water Specifications)
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