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Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Specifications
Type :
Testing Machine
Accuracy Class :
High Accuracy
Accuracy :
/
Brand Name :
LONROY
Place of Origin :
Guangdong, China
Application :
Auto Testing
customized support :
OEM, ODM, OBM
power :
--
Protection Class :
Ip56
Voltage :
220 V
warranty :
1 Year
Polarizers :
Glan-Thompson
Fiber :
anti-UV passivation; NA=0.22;clear aperture 600um
Power :
220VAC+10%
Room temperature :
environment temperature(10-30)℃
MOQ :
1
Description

Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

I. Overview

LR-A426 is an integrated in-situ spectroscopic ellipsometer designed for organic/inorganic coatings. The need for membrane process research is to develop customized in-situ film online monitoring technology. Develop and rapidly implement in-situ characterization and analysis of optical films.

II. Test Cases

Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

Film-forming process monitoring

Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

Film thickness characterization

Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

III. Product Applications

It is widely applied in the physical/chemical vapor deposition, ALD deposition and other optical film processing procedures of metal films, organic films and inorganic films. It can conduct in-situ online monitoring during the process and provide real-time feedback on the measured physical property data.

Integrated In-situ Spectroscopic Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

Technical Specification

Incident angle

65°

Beam deviation

< 0.3°

Measurement parameters

Psi&Del,TanPsi&CosDel,Alpha&Beta

Polarizers

Glan-Thompson

Material

a-BBO

Compensator

quarter-wave phase delay, hyper achromatic

Intensity selection

Linear optical density selection element. Ensures good signal-to-noise ratio in measurement process, improves data accuracy,
avoids light intensity to saturate or too weak to reduce the signal-to-noise ratio and accuracy

Optical design

dual fiber convey the light from lamp to spectrometer through polarization elements;stable light path, convenient to change lamps

Fiber

anti-UV passivation; NA=0.22;clear aperture 600um

Micro light spot

diameter ≤200um, to distinguish between the useful light reflected from front surface and the useless light reflected from the
bottom surface, easy to disassemble

Slit

1 50um, for distinguishing between the useful light reflected from front surface and the useless light reflected from the bottom
surface

Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic EllipsometerIntegrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic EllipsometerIntegrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

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Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

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Product Detail
Type :
Testing Machine
Accuracy Class :
High Accuracy
Accuracy :
/
Brand Name :
LONROY
Place of Origin :
Guangdong, China
Application :
Auto Testing
Contact Supplier
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer
Integrated In-situ Spectral Ellipsometer Optical Films In-situ Analysis Machine Customized Spectroscopic Ellipsometer

DONGGUAN LONROY EQUIPMENT CO LTD

Verified Supplier
2 Years
guangdong, dongguan
Since 2008
Business Type :
Manufacturer, Agent, Exporter, Seller
Main Products :
Lab Test Machine, Ink Proofer, Ceramic Tester
Total Annual :
$5 million -$8 million
Employee Number :
80~200
Certification Level :
Verified Supplier
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