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Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Specifications
Type :
Testing Machine
Accuracy Class :
High Accuracy
Accuracy :
/
Brand Name :
LONROY
Place of Origin :
Guangdong, China
Application :
Auto Testing
customized support :
OEM, ODM, OBM
power :
--
Protection Class :
Ip56
Voltage :
220 V
warranty :
1 Year
Wavelength Range :
250 nm to 1700 nm
Spot Size :
1 mm to 5 mm (variable)
Sample Size :
Up to 200 mm in diameter
Measurement Time :
Approximately 1 second per position point
MOQ :
1
Description

Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument

I. Overview

LR-SE-M is a dedicated spectroscopic ellipsometer customized for the semiconductor industry for micro-area pattern structure measurement. It adopts 1. ultra-miniature light spot detection measurement technology and 2. customized ultra-fast measurement speed technology. It can be applied to the measurement of n/k/d of anti-reflection films, conductive films and other thin films on various transparent substrates, and is perfectly suitable for the optical parameter analysis of various micro-area patterns.

II. Special Features

1. The spot size can be customized, with the minimum reaching 30um.

2. Ultra-fast measurement, with a single measurement time of less than 0.5 seconds;

3. The series configuration is flexible and supports customized functional design.

4. Compact structure, more suitable for online integrated measurement.

III. Measurement Examples

Microstructure measurement of captured area in the image

Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument

Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument

Technical Specification

Wavelength Range

250 nm to 1700 nm

Spot Size

1 mm to 5 mm (variable)

Sample Size

Up to 200 mm in diameter

Measurement Thickness Range*

~30 μM

Measurement Time

Approximately 1 second per position point

Incident Angle Range

20° to 90° (5-degree intervals)

Repeatability Error*

Less than 1 Å (angstrom)

Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer InstrumentSpectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument

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Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument

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Product Detail
Type :
Testing Machine
Accuracy Class :
High Accuracy
Accuracy :
/
Brand Name :
LONROY
Place of Origin :
Guangdong, China
Application :
Auto Testing
Contact Supplier
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument

DONGGUAN LONROY EQUIPMENT CO LTD

Verified Supplier
1 Years
guangdong, dongguan
Since 2008
Business Type :
Manufacturer, Agent, Exporter, Seller
Main Products :
Lab Test Machine, Ink Proofer, Ceramic Tester
Total Annual :
$5 million -$8 million
Employee Number :
80~200
Certification Level :
Verified Supplier
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