Omron's D6F Series MEMS flow sensors offer faster and more accurate mass flow measurement, capable of detecting minute airflow changes. Utilizing Omron's unique MEMS technology, these sensors provide precise measurements independent of temperature and pressure, making them ideal for applications requiring accurate flow control, such as combustion control and HVAC systems. The series features a dust-resistant structure with a built-in dust segregation system, ensuring high reliability and a long service life.
| Model | Applicable Gas | Shape | Flow Rate Range (L/min) | Differential Pressure Range (Pa) | Flow Velocity Range (m/s) | Output Type | Page |
| D6F-P0001A1 | Air | Minute to middle flow | 00.1 | Analog | 5 | ||
| D6F-P0010A | Air | Minute to middle flow | 01 | Analog | 5 | ||
| D6F-P0010AM2 | Air | Minute to middle flow | 01 | Analog | 5 | ||
| D6F-01A1-110 | Air | Compact, High-Acuracy | 0 to 1 | Analog | 9 | ||
| D6F-02A1-110 | Air | Compact, High-Acuracy | 0 to 2 | Analog | 9 | ||
| D6F-03A3-000 | Air | Minute to middle flow | 03 | Analog | 5 | ||
| D6F-01N2-000 | Natural gas (13A), LP gas | 01 | 5 | ||||
| D6F-02L2-000 | Natural gas (13A), LP gas | 02 | 5 | ||||
| D6F-02L7-000 | Natural gas (13A), LP gas | 02 | 5 | ||||
| D6F-05N2-000 | Natural gas (13A), LP gas | 05 | 5 | ||||
| D6F-05N7-000 | Natural gas (13A), LP gas | 05 | 5 | ||||
| D6F-10A5-000 | Air | Minute flow | 010 | Analog | 6 | ||
| D6F-10A6-000 | Air | Minute flow | 010 | Analog | 6 | ||
| D6F-10A7-000 | Air | Minute flow | 010 | Analog | 6 | ||
| D6F-10A7D-000 | Air | Minute flow | 010 | Digital | 6 | ||
| D6F-20A5-000 | Air | Middle to high flow | 020 | Analog | 6 | ||
| D6F-20A6-000 | Air | Middle to high flow | 020 | Analog | 6 | ||
| D6F-20A7D-000 | Air | Middle to high flow | 020 | Digital | 6 | ||
| D6F-30A7-000 | Air | Middle to high flow | 030 | Analog | 6 | ||
| D6F-30AB71-000 | Air | Middle to high flow | 030 | Digital | 6 | ||
| D6F-50A5-000 | Air | Middle to high flow | 050 | Analog | 6 | ||
| D6F-50A6-000 | Air | Middle to high flow | 050 | Analog | 6 | ||
| D6F-50A7D-000 | Air | Middle to high flow | 050 | Digital | 6 | ||
| D6F-70AB71-000 | Air | Middle to high flow | 070 | Analog | 6 | ||
| D6F-70AB71D-000 | Air | Middle to high flow | 070 | Digital | 6 | ||
| D6F-W01A1 | Air | Flow Velocity | 01 | Analog | 8 | ||
| D6F-W04A1 | Air | Flow Velocity | 04 | Analog | 8 | ||
| D6F-W10A1 | Air | Flow Velocity | 010 | Analog | 8 | ||
| D6F-V03A1 | Air | Flow Velocity | 03 | Analog | 8 | ||
| D6F-PH0505AD1 | Air | Differential pressure | 0250 | Digital | 8 | ||
| D6F-PH0505AD2 | Air | Differential pressure | 0250 | Digital | 8 | ||
| D6F-PH0505AMD2 | Air | Differential pressure | 0250 | Digital | 8 | ||
| D6F-PH0025AD1 | Air | Differential pressure | -5050 | Digital | 8 | ||
| D6F-PH0025AD2 | Air | Differential pressure | -5050 | Digital | 8 | ||
| D6F-PH0025AMD2 | Air | Differential pressure | -5050 | Digital | 8 | ||
| D6F-PH5050AD3 | Air | Differential pressure | -500500 | Digital | 8 | ||
| D6F-PH5050AD4 | Air | Differential pressure | -500500 | Digital | 8 | ||
| D6F-PH5050AMD4 | Air | Differential pressure | -500500 | Digital | 8 |