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GRM41 Dry Vacuum Pump System 600 L/min KF40 PMSM Energy Efficient Drive for Semiconductor Vacuum Coating
GRM41 Dry Vacuum Pump System 600 L/min KF40 PMSM Energy Efficient Drive for Semiconductor Vacuum Coating
GRM41 Dry Vacuum Pump System 600 L/min KF40 PMSM Energy Efficient Drive for Semiconductor Vacuum Coating
GRM41 Dry Vacuum Pump System 600 L/min KF40 PMSM Energy Efficient Drive for Semiconductor Vacuum Coating
Specifications
Model Number :
GRM41
MOQ :
1 Set
Ultimate Pressure (Gas Ballast Closed) :
≤1 Pa
Motor Type :
PMSM (Permanent Magnet Synchronous Motor)
Max Water Vapor Capacity :
350 g/h
Delivery Time :
15-30 working days after order confirmation
Protection Class :
IP20D
Payment Terms :
T/T
Ultimate Pressure (Gas Ballast Open) :
≤10 Pa
Dimensions :
630×347×400 mm
Max Continuous Inlet Pressure :
1000 mbar
Outlet Connection :
KF25
Maximum Pumping Speed :
600 L/min (36 m³/h)
Place of Origin :
Zhejiang, China
Brand Name :
OEM
Supply Ability :
200 Sets per Month
Weight :
54 kg
Type :
Dry Vacuum Pump System
Noise Level :
≤65 dB
Motor Power :
0.75 kW
Rated Current :
2.4 A
Gas Ballast Connection :
PT1/4
Price :
Negotiable
Model :
GRM41
Oil Volume :
0.25 L
Packaging Details :
Export-grade plywood case with shock-proof foam insert and vacuum-sealed moisture barrier
Exhaust Pressure :
≤3000 Pa
Inlet Connection :
KF40
Gas Ballast Pressure :
0.02-0.05 MPa
Power Supply :
200-240V, Single Phase, 50/60Hz
Control Interface :
RS485 Remote Monitoring
Ambient Temperature :
5-40 ℃
Description

GRM41 Dry Vacuum Pump System

The GRM41 is a high-performance oil-free dry vacuum pump system engineered for demanding high-purity vacuum processes in semiconductor manufacturing, photovoltaic cell production, and flat panel display fabrication. Equipped with a PMSM (Permanent Magnet Synchronous Motor) energy-efficient drive delivering 0.75 kW output, this compact system achieves an impressive 600 L/min (36 m³/h) maximum pumping speed with an ultimate pressure of ≤1 Pa. The integrated RS485 remote monitoring interface enables seamless integration into automated production environments.

Key Features

  • PMSM Energy Efficient Drive: Permanent magnet synchronous motor technology delivers superior energy efficiency with 0.75 kW power consumption, reducing operational costs while maintaining high performance.
  • Oil-Free Dry Operation: No oil contamination risk in process chambers, ensuring ultra-clean vacuum conditions essential for semiconductor and photovoltaic manufacturing.
  • High Vacuum Performance: Achieves ultimate pressure of ≤1 Pa (gas ballast closed) and ≤10 Pa (gas ballast open), suitable for demanding high-vacuum applications.
  • Integrated Gas Ballast System: Built-in gas ballast valve with PT1/4 connection handles water vapor up to 350 g/h, preventing condensation and extending pump service life.
  • RS485 Remote Monitoring: Intelligent control interface supports remote operation, parameter monitoring, and diagnostic capabilities for Industry 4.0 integration.
  • Compact Lightweight Design: Dimensions of 630*347*400mm and weight of only 54 kg allow easy installation in space-constrained cleanroom environments.
  • Low Noise Operation: Noise level ≤65 dB with integrated silencer and check valve, ensuring comfortable working environments.
  • Robust Construction: Aluminum alloy and cast iron housing with fluoroelastomer (FKM) seals ensure long-term reliability and chemical compatibility.
  • KF Standard Interfaces: KF40 inlet and KF25 exhaust connections for quick, tool-free assembly with standard vacuum components.

Technical Specifications

ParameterSpecification
ModelGRM41
TypeDry Vacuum Pump System
Maximum Pumping Speed600 L/min (36 m³/h)
Ultimate Pressure (Gas Ballast Open)≤10 Pa
Ultimate Pressure (Gas Ballast Closed)≤1 Pa
Max Continuous Inlet Pressure1000 mbar
Exhaust Pressure≤3000 Pa
Motor Power0.75 kW
Motor TypePMSM (Permanent Magnet Synchronous Motor)
Power Supply200-240V, Single Phase, 50/60Hz
Rated Current2.4 A
Inlet ConnectionKF40
Outlet ConnectionKF25
Gas Ballast ConnectionPT1/4
Gas Ballast Pressure0.02-0.05 MPa
Max Water Vapor Capacity350 g/h
Noise Level≤65 dB
Oil Volume0.25 L
Weight54 kg
Dimensions (L*W*H)630*347*400 mm
Protection ClassIP20D
Control InterfaceRS485 Remote Monitoring
Ambient Temperature5-40 ℃

Typical Applications

  • Semiconductor wafer processing and fabrication
  • Photovoltaic cell manufacturing (PVD, PECVD, etching)
  • Flat panel display and OLED production
  • Vacuum coating and thin film deposition
  • Research and laboratory high-vacuum systems
  • Laser and optics industry
  • Analytical instrumentation backing pump
  • Load lock chamber evacuation
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GRM41 Dry Vacuum Pump System 600 L/min KF40 PMSM Energy Efficient Drive for Semiconductor Vacuum Coating

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Product Detail
Model Number :
GRM41
MOQ :
1 Set
Ultimate Pressure (Gas Ballast Closed) :
≤1 Pa
Motor Type :
PMSM (Permanent Magnet Synchronous Motor)
Max Water Vapor Capacity :
350 g/h
Delivery Time :
15-30 working days after order confirmation
Contact Supplier
GRM41 Dry Vacuum Pump System 600 L/min KF40 PMSM Energy Efficient Drive for Semiconductor Vacuum Coating
GRM41 Dry Vacuum Pump System 600 L/min KF40 PMSM Energy Efficient Drive for Semiconductor Vacuum Coating

SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.

Verified Supplier
2 Years
suzhou
Business Type :
Manufacturer, Distributor/Wholesaler, Agent, Exporter, Trading Company, Seller
Main Products :
Rotary Vane Vacuum Pump, Dry Scroll Vacuum Pump, Dry Screw Vacuum Pump
Certification Level :
Verified Supplier
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