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GRM201 PMSM 200 M³/H Dry Running Vacuum Pump ISO63 KF25
GRM201 PMSM 200 M³/H Dry Running Vacuum Pump ISO63 KF25
Specifications
Delivery Time :
15-30 working days
Pumping Speed :
200 m³/h
Gas Compatibility :
Flammable, explosive, and condensable process gases
Model Number :
GRM201
Payment Terms :
T/T, L/C, Western Union
Cooling Water Flow :
≥3 L/min
Outlet Connection :
KF25
Place of Origin :
China
Dimensions (L×W×H) :
741×344×466 mm
Cooling Water Temperature :
5-30 °C
Noise Level :
≤63 dB(A)
Control Interface :
I/O and RS485 (Modbus Protocol)
Voltage :
380V Three-Phase
Weight :
150 kg
Rated Power :
1.9 kW
N2 Purge Flow :
12-50 L/min
Sealing System :
Lip Seal + Labyrinth Seal with N2 Purge
Brand Name :
GRM
MOQ :
1 Set
Price :
USD 5,000-8,000 / Set
Supply Ability :
300 Sets per Month
Motor Type :
Permanent Magnet Synchronous Motor (PMSM)
Packaging Details :
Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert
Inlet Connection :
ISO63
Certification :
ISO 9001:2015, ISO 14001:2015, ISO 45001:2018
Ultimate Pressure :
≤0.5 Pa
Pump Type :
Dry Vacuum Pump
Description

GRM201 Dry Vacuum Pump

The GRM201 is a 200 m³/h dry vacuum pump delivering low power consumption and high pumping speed. It safely handles flammable, explosive, and condensable process gases, making it suitable for PECVD, MOCVD, and SIC-CVD semiconductor processes with high reliability and low maintenance costs.

Key Features

  • Permanent Magnet Synchronous Motor — Delivers superior energy efficiency with industry-leading low power consumption.
  • Advanced Rotor Structure — Enhanced dust extraction capability ensures reliable operation in particulate-heavy process environments.
  • Dust and Water Vapor Tolerant — Insensitive to dust and water vapor entrained in the pumped gas stream.
  • Compact and Integrated Design — Small footprint with high system integration for easy installation in crowded fab environments.
  • Comprehensive Protection — Built-in protection functions with strong adaptive capability for varying process conditions.
  • Low Vibration and Noise — Operates at ≤63 dB(A) at ultimate pressure for a quieter workplace.
  • Advanced Sealing System — Lip seal and labyrinth seal combined with nitrogen purge effectively prevents oil back-streaming, maintaining high vacuum cleanliness in the process chamber.
  • Remote Control and Monitoring — Supports I/O interface and RS485 communication (Modbus protocol) for seamless integration into factory automation systems.
  • Hazardous Gas Compatible — Safe operation with flammable, explosive, and condensable process gases.

Technical Specifications

Parameter Specification
Pumping Speed 200 m³/h
Ultimate Pressure ≤0.5 Pa
Rated Power 1.9 kW
Voltage 380V Three-Phase
Cooling Water Pressure 0.2-0.6 MPa
Cooling Water Flow ≥3 L/min
Cooling Water Temperature 5-30 °C
Cooling Water Connection G3/8
N2 Purge Pressure 0.2-0.6 MPa
N2 Purge Flow 12-50 L/min
N2 Purge Connection G1/4
Inlet Connection ISO63
Outlet Connection KF25
Noise Level ≤63 dB(A)
Operating Environment 5~40°C; ≤80% RH
Weight 150 kg
Dimensions (L*W*H) 741*344*466 mm

Application Processes

Clean Processes

Load-Lock, Transfer, Metrology, Lithography

Medium Processes

PVD Process, PVD Pre-Clean, RTA, Strip/Ashing, Oxide Etch, Silicon Etch, Implant Source, Metal Etch

Harsh Processes

HDP-CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, ALD

Target Industries

  • Semiconductor: Etching, ion implantation, CVD, PECVD, MOCVD, and SIC-CVD clean/medium/harsh process applications.
  • Photovoltaic: Crystal growth furnaces, cell manufacturing processes.
  • Lithium Battery: Cell vacuum drying, electrolyte filling, and degassing processes.
  • Flat Panel Display & LED: Manufacturing processes requiring high-cleanliness vacuum environments.
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GRM201 PMSM 200 M³/H Dry Running Vacuum Pump ISO63 KF25

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Product Detail
Delivery Time :
15-30 working days
Pumping Speed :
200 m³/h
Gas Compatibility :
Flammable, explosive, and condensable process gases
Model Number :
GRM201
Payment Terms :
T/T, L/C, Western Union
Cooling Water Flow :
≥3 L/min
Contact Supplier
GRM201 PMSM 200 M³/H Dry Running Vacuum Pump ISO63 KF25

SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.

Verified Supplier
2 Years
suzhou
Business Type :
Manufacturer, Distributor/Wholesaler, Agent, Exporter, Trading Company, Seller
Main Products :
Rotary Vane Vacuum Pump, Dry Scroll Vacuum Pump, Dry Screw Vacuum Pump
Certification Level :
Verified Supplier
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