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GRM1201 1200 M³/H ISO160 KF25 Dry Pump For Semiconductor PV
GRM1201 1200 M³/H ISO160 KF25 Dry Pump For Semiconductor PV
Specifications
Place of Origin :
China
Certification :
ISO 9001:2015, ISO 14001:2015, ISO 45001:2018
Pumping Speed :
1200 m³/h
Gas Compatibility :
Flammable, explosive, and condensable process gases
Cooling Water Flow :
≥4 L/min
Outlet Connection :
KF25
Dimensions (L×W×H) :
865×344×751 mm
Cooling Water Temperature :
5-30 °C
Noise Level :
≤63 dB(A)
Control Interface :
I/O and RS485 (Modbus Protocol)
Price :
USD 13,000-20,000 / Set
Payment Terms :
T/T, L/C, Western Union
Voltage :
380V Three-Phase
Weight :
260 kg
Delivery Time :
15-30 working days
Rated Power :
1.9+1.9 kW
N2 Purge Flow :
12-50 L/min
Sealing System :
Lip Seal + Labyrinth Seal with N2 Purge
Motor Type :
Permanent Magnet Synchronous Motor (PMSM)
Supply Ability :
300 Sets per Month
Inlet Connection :
ISO160
Packaging Details :
Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert
Ultimate Pressure :
≤0.15 Pa
Brand Name :
GRM
Pump Type :
Dry Vacuum Pump
Model Number :
GRM1201
MOQ :
1 Set
Description

GRM1201 Dry Vacuum Pump

The GRM1201 is a 1200 m³/h dry vacuum pump with low power consumption and high pumping speed for large exhaust volume applications. It handles flammable, explosive, and condensable process gases, designed for demanding PECVD, MOCVD, and SIC-CVD processes.

Key Features

  • Permanent Magnet Synchronous Motor — Delivers superior energy efficiency with industry-leading low power consumption.
  • Advanced Rotor Structure — Enhanced dust extraction capability ensures reliable operation in particulate-heavy process environments.
  • Dust and Water Vapor Tolerant — Insensitive to dust and water vapor entrained in the pumped gas stream.
  • Compact and Integrated Design — Small footprint with high system integration for easy installation in crowded fab environments.
  • Comprehensive Protection — Built-in protection functions with strong adaptive capability for varying process conditions.
  • Low Vibration and Noise — Operates at ≤63 dB(A) at ultimate pressure for a quieter workplace.
  • Advanced Sealing System — Lip seal and labyrinth seal combined with nitrogen purge effectively prevents oil back-streaming, maintaining high vacuum cleanliness in the process chamber.
  • Remote Control and Monitoring — Supports I/O interface and RS485 communication (Modbus protocol) for seamless integration into factory automation systems.
  • Hazardous Gas Compatible — Safe operation with flammable, explosive, and condensable process gases.

Technical Specifications

Parameter Specification
Pumping Speed 1200 m³/h
Ultimate Pressure ≤0.15 Pa
Rated Power 1.9+1.9 kW
Voltage 380V Three-Phase
Cooling Water Pressure 0.2-0.6 MPa
Cooling Water Flow ≥4 L/min
Cooling Water Temperature 5-30 °C
Cooling Water Connection G3/8
N2 Purge Pressure 0.2-0.6 MPa
N2 Purge Flow 12-50 L/min
N2 Purge Connection G1/4
Inlet Connection ISO160
Outlet Connection KF25
Noise Level ≤63 dB(A)
Operating Environment 5~40°C; ≤80% RH
Weight 260 kg
Dimensions (L*W*H) 865*344*751 mm

Application Processes

Clean Processes

Load-Lock, Transfer, Metrology, Lithography

Medium Processes

PVD Process, PVD Pre-Clean, RTA, Strip/Ashing, Oxide Etch, Silicon Etch, Implant Source, Metal Etch

Harsh Processes

HDP-CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, ALD

Target Industries

  • Semiconductor: Etching, ion implantation, CVD, PECVD, MOCVD, and SIC-CVD clean/medium/harsh process applications.
  • Photovoltaic: Crystal growth furnaces, cell manufacturing processes.
  • Lithium Battery: Cell vacuum drying, electrolyte filling, and degassing processes.
  • Flat Panel Display & LED: Manufacturing processes requiring high-cleanliness vacuum environments.
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GRM1201 1200 M³/H ISO160 KF25 Dry Pump For Semiconductor PV

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Product Detail
Place of Origin :
China
Certification :
ISO 9001:2015, ISO 14001:2015, ISO 45001:2018
Pumping Speed :
1200 m³/h
Gas Compatibility :
Flammable, explosive, and condensable process gases
Cooling Water Flow :
≥4 L/min
Outlet Connection :
KF25
Contact Supplier
GRM1201 1200 M³/H ISO160 KF25 Dry Pump For Semiconductor PV

SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.

Verified Supplier
2 Years
suzhou
Business Type :
Manufacturer, Distributor/Wholesaler, Agent, Exporter, Trading Company, Seller
Main Products :
Rotary Vane Vacuum Pump, Dry Scroll Vacuum Pump, Dry Screw Vacuum Pump
Certification Level :
Verified Supplier
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