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KGD-MQ-537 NDIR Infrared Gas Sensor with Multi-Gas Monitoring and 1ppm Detection Limit for Semiconductor Applications
KGD-MQ-537 NDIR Infrared Gas Sensor with Multi-Gas Monitoring and 1ppm Detection Limit for Semiconductor Applications
Specifications
Brand Name :
KACISE
Model Number :
KGD-MQ-537
Certification :
CE
Place of Origin :
CHINA
MOQ :
1PCS
Payment Terms :
L/C,D/A,D/P,T/T,Western Union,MoneyGram
Supply Ability :
1000 Piece/Pieces per Week negotiable
Delivery Time :
5-8 work days
Packaging Details :
each unit has individual box and all boxes are packed in standard packages or customers requests available
Detection Principle :
NDIR
Detected Gases :
SiF4, CF4, SF6, NF3, CO2
Measuring Range :
1 - 264ppm (0 - 200mTorr)
Repeatability :
±0.5%
Linearity :
±1%F.S.
Detection Limit :
1ppm
Description
KGD-MQ-537 Infrared Gas Sensor
Product Overview
KGD - MQ - 537 Infrared Gas Sensor

The KGD-MQ-537 Infrared Gas Sensor utilizes Non-Dispersive Infrared (NDIR) technology to accurately measure gases including SiF4, CF4, SF6, NF3, and CO2 in semiconductor applications. Designed with compatibility for common equipment dimensions, flanges, and communication protocols, this sensor is ideal for endpoint detection in semiconductor deposition and cleaning processes, as well as terminal detection for chamber cleaning, helping to reduce cleaning time, cut costs, and increase production.

KGD-MQ-537 NDIR Infrared Gas Sensor with Multi-Gas Monitoring and 1ppm Detection Limit for Semiconductor Applications
Key Features
  • Utilizes NDIR technology with multi-gas monitoring capability (SiF4, CF4, SF6, NF3, CO2, etc.)
  • Fast response time and high sensitivity
  • No consumables required
  • Analog/digital communication options
  • Modular design for easy integration
Technical Specifications
Parameter Details
Detection Principle NDIR
Detected Gases SiF4, CF4, SF6, NF3, CO2
Measuring Range 1-264ppm (0-200mTorr)
Repeatability ±0.5%
Linearity ±1% F.S.
Detection Limit 1ppm
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KGD-MQ-537 NDIR Infrared Gas Sensor with Multi-Gas Monitoring and 1ppm Detection Limit for Semiconductor Applications

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Product Detail
Brand Name :
KACISE
Model Number :
KGD-MQ-537
Certification :
CE
Place of Origin :
CHINA
MOQ :
1PCS
Payment Terms :
L/C,D/A,D/P,T/T,Western Union,MoneyGram
Contact Supplier
KGD-MQ-537 NDIR Infrared Gas Sensor with Multi-Gas Monitoring and 1ppm Detection Limit for Semiconductor Applications

Xi'an Kacise Optronics Co.,Ltd.

Verified Supplier
8 Years
Shaanxi
Since 2008
Business Type :
Manufacturer
Main Products :
Water Quality Sensor, Precision Pressure Sensor, Fluid Level Meter
Total Annual :
8000000-10000000
Employee Number :
100~150
Certification Level :
Verified Supplier
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