Alumina Ceramic Parts for Industrial Semiconductor
High-Performance Alumina Ceramic Part:
When your process runs at 1600°C, faces plasma erosion, and demands micron-level precision
—only alumina ceramic delivers. Here’s how it transforms your workflow:
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Ultra-High Purity & Insulation: 99.5%-99.99% Al₂O₃ grade, volume resistivity >10¹⁴ Ω·cm, ideal for high-voltage insulation in ICP etchers and ion implanters .
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Extreme Plasma Resistance: Outperforms quartz in Cl₂/CF₄ plasma environments, reducing replacement frequency by 60% and lowering maintenance costs .
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Thermal Stability: Withstands up to 1600°C, thermal expansion coefficient (7-8×10⁻⁶/°C) perfectly matches silicon wafers, eliminating thermal stress failures .
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Class 1 Cleanroom Compliance: Mirror-finish surface (Ra < 0.01μm) with minimal particle release, safe for direct wafer contact components .
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Thermal Conductivity @ 20°C
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Thermal Expansion a at 20–400°C
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Properties
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Unit
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95%Al2O3
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99%Al2O3
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99.5%Al2O3
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Dielectric Constant
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1MHz
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9.4
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9.9
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9.9
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Dielectric Strength
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V/m
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15 x 10 6
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15 x 10 6
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15 x 10 6
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Dielectric Loss
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1MHz
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4 x 10 -4
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4 x 10 -4
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4 x 10 -4
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Volume Resistivity @ 25°C
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Ω・cm
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>10 14
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>10 14
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>10 14
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Volume Resistivity @ 500°C
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Ω・cm
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>10 8
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>10 8
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>10 10
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Various Types of Alumina Ceramic Part
We Can Do OEM and 0BM According to Your Drawing and Requirements.
Features of alumina ceramic
* Relatively low density;
* Extremely high operating temperature;
* Very high hardness and compressive strength;
* Excellent electrical insulation properties;
* Corrosion and wear resistance;
* Biologically inert, food compatibility.
Alumina Ceramic Properties
The following only lists the performance parameters of the three most common aluminum oxide ceramics. Normally, alumina ceramics
are composed of these types
Packing
Q1. Do you provide product samples? Yes, we provide samples subject to availability. A nominal sample fee may apply in some cases, and shipping costs are borne by the customer.
Q2. What are your accepted payment methods? We accept T/T (bank transfer) in advance, Western Union, Alipay, and PayPal.
Q3. What is your typical delivery lead time? Lead times vary depending on product requirements, including material selection, dimensions, and specific manufacturing processes.
Q4. Do you perform quality inspection before shipment? Yes, we conduct 100% inspection of all goods prior to delivery to ensure they meet specified standards.
Q5. What other ceramic materials do you offer? We supply a range of advanced ceramic materials, including Alumina, Zirconia, Aluminum Nitride,Boron Nitride, Silicon Nitride, Machinable Glass Ceramic, and related specialized ceramics.