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Electron Gun Optical Coating Machine for Mineral Glass Optical Lens, Polymer Optical Lens
Electron Gun Optical Coating Machine for Mineral Glass Optical Lens, Polymer Optical Lens
Specifications
Place of Origin :
Guangdong
Brand Name :
Lion King
Certification :
CE
MOQ :
1
Delivery Time :
20
Coating Warranty :
1 year
Substrate Material :
Glass, Metal, Ceramic
Coating Type :
Optical
Coating Deposition Rate :
1-5 Å/s
Coating Hardness :
≥800HV
Coating Chamber Size :
Customizable
Coating Power Supply :
High Voltage Power Supply
Coating Adhesion :
≥100N
Coating Uniformity :
±5%
Coating Material :
Electron Gun
Coating Control System :
PLC Touch Screen
Coating Thickness :
0.1-10 microns
Coating Method :
Electron Beam Evaporation
Coating Temperature :
≤200℃
Coating Transparency :
≥95%
Coating Application :
Optical Lenses, Mirrors, Filters
Coating Features :
High Efficiency, Low Cost, Easy Operation
Coating Substrate :
Glass, Metal, Ceramic, etc.
Warranty :
1 year
Vacuum Chamber Size :
Customizable
Power Supply :
AC 220V, 50/60Hz
Application :
Electron Gun Coating
Coating Size :
Customizable
Type :
Coating Machine
Description

Optical Coating Equipment

Applications:

AR/AF

High reflective film

Spectroscopic film

Other optical film

Features:

Equipped with 6-point crystal oscillator sensor+film thickness controller

RF ion source

Equipped with double electron guns,multi-point and ring crucible

Automatic evaporation control system is used to realize automatic evaporation process

Workholder can be optionally equipped with umbrella type or planetary type


Specification

Vacuum chamber

SUS 304, φ1550mmx1800mm(H)

Workholder size

φ1400mm

Workholder speed

0-60rpm(variable)

Film thickness detection device

6-point crystal oscillator sensor + film thickness controller

Evaporation source

2 sets of electron guns

lon source

23cm RF ion source

Exhaust system

Mechanical pump+diffusion pump(or molecular pump)+cryogenic capture pump

Performance

Ultimate pressure

Below 7.0x10-4Pa

Exhaust time

15 min(atmospheric pressure~1.3x10- 3Pa)

Substrate temperature

Maximum:350°C

Working condition

Equipment size

about 5500mm(W)x7200mm(D)x3700mm(H)

Power source

3-phase power supply,380v,50Hz,approximately 100kVA

Cooling water

Water flow rate is 11m³/h,temperature is 20°C-25°C

Air pressure

Above 0.6-0.7MPa

Weight

About 11000kg



1. Equipped with quartz crystal or optical film thickness control instrument, can realize automatic and precise film thickness control.

2. Equipped with ion bombardment device purifies the substrate surface to make better adhesion between the film layer and the substrate surface and improve the quality of the film layer.

3. Equipped with large crucible electron gun, the film material surface is smooth and the film layer is evenly distributed in the whole evaporation process

Adopts programmable controller (PLC), touch screen (HMI) man-machine control interface, easy to operate, manual/full automatic control freely switch.


Optics Vacuum Coating Machine

Introduction: This machine is mainly used for plating various films such as transparency enhanced film, spectroscopic film, band pass film/cutoff film, and high reflection film. It can plate a super large film system with 100 lays of film, and a transparency enhanced film with various colors, a reflection film with a red, yellow, blue, green or rainbow color

Main Features:

1. This machine is equipped with a super big crucible electronic gun. In the entire evaporation process the film surface is flat and evaporation distribution is even.

2. This machine is equipped with a quartz crystal film thickness control instrument to control the film forming speed and metallization process automatically.

3. This machine is equipped with a high power ion source to produce a film thickness with good quality.

4. The overall structure is rationally designed to better satisfy the process requirements. The vacuum system is automatically controlled by PLC for convenient operation.

5. The vacuum operating system is protected with an interlock. The diffusion pump has water cutoff and phase loss alarm functions.

6. Touch screen and PLC automatic control are used to set parameters of main components of the entire machine, to monitor the running of this machine at real time, and to diagnose faults intelligently.

Main Configuration:

1. The vacuum chamber is a vertical type boxed structure with a front door; the box is completely made of stainless steel; dimensions of the internal cavity are Φ800mm1200mm.

2. Vacuum System Configuration: with molecular pump(or diffusion pump), Roots pump, mechanical pumps.

3. Deep Cooling System with a Fast Cycle Water Vapor Cryopump

4. Work Piece Rack is an integrated arched shape work piece, can be customized according to the customer.

5. Coating system is equipped with one or two sets of high power e-type 270°magnetic deflection electronic gun scanning in XY directions. The auxiliary metallization system is equipped with a Holl ion source.

6. Baking: Digitally displayed and automatically controlled with a temperature control precision of ±1.5.

7. The film thickness monitoring system can control evaporation rate of the electronic gun. The optical film thickness monitoring system, in which the wave length is controlled within the range of 200-900nm .

8. Control System: The vacuum is controlled by a 10.4 inches color touch screen coupled with a programmable logic controller. The vacuum and coating process are controlled fully automatically.


Parameter Specification

Model

Lion-700

Lion-1000

Lion-1100

Lion-1300

Lion-1350

Chamber Size

750×800mm

1000×1100

1100×1300

1300×1350

1350×1500

Coating Film Type

Optical antireflection film, AR, broadband antireflection, single-point antireflection, optical filter and decorative film

Fixture

4 pieces of arc-shaped fixtures, single arc-shaped plate revolution, 3 pieces of plates planet rotation and revolution, 12 shafts rotation and revolution (horizontal)

Vacuum Chamber Structure

vertical / horizontal (304 stainless steel), vacuum system post positioned

Vacuum System

slide valve pump(rotary pump), roots pump, diffusion pump, maintaining pump (optional: molecular pump, deep cold pump, deep cold system)

Heating System

heated by heating tube, PID control, the max temperature: 350 degrees

Inflation System

mass flow controller & electric magnetic valve

Electric Gun

Electric gun 4 round shaped crucibles and a U shaped crucible, high voltage 4KV-8KV adjustable. Triangle wave, sine-wave and rectangle wave scanning are optional.

Resistance Evaporation Source

2 groups of resistance evaporation source

Ion Source

power 2KW, max anode current 6A. double filaments which increase the attaching force, density and reflective index of film layer (Kerr)

Crystal Film Thickness Controller

crystal film thickness controller SQC-310(America)and PLC make up the fully automatic pumping and E-beam evaporation system.

Ultimate Vacuum

8×104paclean and unloaded

Pump Time

From atmosphere to 5×103pa less than 15 minutes

Controlling Method

manual, semi-automatic, fully automatic / touching screen & PLC

Remark

Can be designed according to customers request


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Electron Gun Optical Coating Machine for Mineral Glass Optical Lens, Polymer Optical Lens

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Product Detail
Place of Origin :
Guangdong
Brand Name :
Lion King
Certification :
CE
MOQ :
1
Delivery Time :
20
Coating Warranty :
1 year
Contact Supplier
Electron Gun Optical Coating Machine for Mineral Glass Optical Lens, Polymer Optical Lens

Guangdong Zhongda Vacuum Equipment Co., Ltd.

Verified Supplier
1 Years
guangdong, zhaoqing
Since 2003
Business Type :
Manufacturer
Main Products :
Evaporation Vacuum Coating Machine, Magnetron Sputtering Vacuum Coating Machine, Multi Arc Ion Vacuum Coating Machine
Total Annual :
1 million US dollars-2 million US dollars
Employee Number :
80people~100 people
Certification Level :
Verified Supplier
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