Optical Coating Equipment Applications: AR/AF High reflective film Spectroscopic film Other optical film Features: Equipped with 6-point crystal oscillator sensor+film thickness controller RF ion source Equipped with double electron beams,multi-point and ring crucible Automatic evaporation control system is used to realize automatic evaporation process Workholder can be optionally equipped with umbrella type or planetary type Specification Vacuum chamber SUS 304, φ1550mmx1800mm(H) Workholder size φ1400mm Workholder speed 0-60rpm(variable) Film thickness detection device 6-point crystal oscillator sensor + film thickness controller Evaporation source 2 sets of electron beams lon source 23cm RF ion source Exhaust system Mechanical pump+diffusion pump(or molecular pump)+cryogenic capture pump Performance Ultimate pressure Below 7.0x10-4Pa Exhaust time 15 min(atmospheric pressure~1.3x10- 3Pa) Substrate temperature Maximum:350°C Working condition Equipment size about 5500mm(W)x7200mm(D)x3700mm(H) Power source 3-phase power supply,380v,50Hz,approximately 100kVA Cooling water Water flow rate is 11m³/h,temperature is 20°C-25°C Air pressure Above 0.6-0.7MPa Weight About 11000kg 1. Equipped with quartz crystal or optical film thickness control instrument, can realize automatic and precise film thickness control. 2. Equipped with ion bombardment device purifies the substrate surface to make better adhesion between the film layer and the substrate surface and improve the quality of the film layer. 3. Equipped with large crucible electron beam, the film material surface is smooth and the film layer is evenly distributed in the whole evaporation process Adopts programmable controller (PLC), touch screen (HMI) man-machine control interface, easy to operate, manual/full automatic control freely switch. Optics Vacuum Coating Machine Introduction: This machine is mainly used for plating various films such as transparency enhanced film, spectroscopic film, band pass film/cutoff film, and high reflection film. It can plate a super large film system with 100 lays of film, and a transparency enhanced film with various colors, a reflection film with a red, yellow, blue, green or rainbow color Main Features: 1. This machine is equipped with a super big crucible electronic beam. In the entire evaporation process the film surface is flat and evaporation distribution is even. 2. This machine is equipped with a quartz crystal film thickness control instrument to control the film forming speed and metallization process automatically. 3. This machine is equipped with a high power ion source to produce a film thickness with good quality. 4. The overall structure is rationally designed to better satisfy the process requirements. The vacuum system is automatically controlled by PLC for convenient operation. 5. The vacuum operating system is protected with an interlock. The diffusion pump has water cutoff and phase loss alarm functions. 6. Touch screen and PLC automatic control are used to set parameters of main components of the entire machine, to monitor the running of this machine at real time, and to diagnose faults intelligently. Main Configuration: 1. The vacuum chamber is a vertical type boxed structure with a front door; the box is completely made of stainless steel; dimensions of the internal cavity are Φ800mm1200mm. 2. Vacuum System Configuration: with molecular pump(or diffusion pump), Roots pump, mechanical pumps. 3. Deep Cooling System with a Fast Cycle Water Vapor Cryopump 4. Work Piece Rack is an integrated arched shape work piece, can be customized according to the customer. 5. Coating system is equipped with one or two sets of high power e-type 270°magnetic deflection electronic beam scanning in XY directions. The auxiliary metallization system is equipped with a Holl ion source. 6. Baking: Digitally displayed and automatically controlled with a temperature control precision of ±1.5. 7. The film thickness monitoring system can control evaporation rate of the electronic beam. The optical film thickness monitoring system, in which the wave length is controlled within the range of 200-900nm . 8. Control System: The vacuum is controlled by a 10.4 inches color touch screen coupled with a programmable logic controller. The vacuum and coating process are controlled fully automatically. Parameter Specification Model ZDGX-700 ZDGX-1000 ZDGX-1100 ZDGX-1300 ZDGX-1350 Chamber Size 750×800mm 1000×1100 1100×1300 1300×1350 1350×1500 Coating Film Type Optical antireflection film, AR, broadband antireflection, single-point antireflection, optical filter and decorative film Fixture 4 pieces of arc-shaped fixtures, single arc-shaped plate revolution, 3 pieces of plates planet rotation and revolution, 12 shafts rotation and revolution (horizontal) Vacuum Chamber Structure vertical / horizontal (304 stainless steel), vacuum system post positioned Vacuum System slide valve pump(rotary pump), roots pump, diffusion pump, maintaining pump (optional: molecular pump, deep cold pump, deep cold system) Heating System heated by heating tube, PID control, the max temperature: 350 degrees Inflation System mass flow controller & electric magnetic valve Electric beam Electric beam 4 round shaped crucibles and a U shaped crucible, high voltage 4KV-8KV adjustable. Triangle wave, sine-wave and rectangle wave scanning are optional. Resistance Evaporation Source 2 groups of resistance evaporation source Ion Source power 2KW, max anode current 6A. double filaments which increase the attaching force, density and reflective index of film layer (Kerr) Crystal Film Thickness Controller crystal film thickness controller SQC-310(America)and PLC make up the fully automatic pumping and E-beam evaporation system. Ultimate Vacuum 8×104paclean and unloaded Pump Time From atmosphere to 5×103pa less than 15 minutes Controlling Method manual, semi-automatic, fully automatic / touching screen & PLC Remark Can be designed according to customers request