Industrial Grade Reaction Magnetron Sputtering Vacuum Coater Machine
Professional PVD vacuum coating system designed for high-end hardware and stainless steel parts with advanced magnetron sputtering technology.
Product Specifications
| Product Type |
PVD Vacuum Coating Machine |
| Primary Applications |
High-End Hardware and Stainless Steel Parts |
| Construction Material |
Stainless Steel |
| Machine Type |
Industrial Coating Machine, Metal Coating Machine |
| Weight Range |
5-10 Ton |
| Coating Head Type |
Other |
| Coating Width |
Customized |
Key Technical Advantages
- High Deposition Rate: Magnetic field increases plasma density for faster sputtering, solving low efficiency issues of traditional diode sputtering
- Superior Film Quality: Produces high-density films with excellent adhesion to substrates and exceptional uniformity
- Broad Material Compatibility: Works with metals, alloys, semiconductors, insulators, and high-melting-point materials
- Precise Process Control: Adjust film thickness, composition, and microstructure by tuning power, gas flow, pressure, and substrate temperature
- Low Contamination: Vacuum environment and physical deposition process minimize chemical impurities in films
System Components & Structure
- Vacuum System: Includes mechanical pump, turbomolecular pump, and vacuum gauge to maintain high vacuum and prevent film contamination
- Target Assembly: Consists of target and magnetic assembly to generate the magnetic field
- Power Supply: Provides energy for plasma generation with common types including DC, RF, and pulsed DC
- Substrate Holder: Fixes and heats/cools substrates with optional rotation function to improve film uniformity
- Gas Control System: Uses mass flow controllers for precise regulation of inert or reactive gas flow rates
- Film Thickness Monitor: In-situ monitors track film thickness in real time to ensure process accuracy