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Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination
Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination
Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination
Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination
Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination
Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination
Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination
Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination
Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination
Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination
Specifications
Brand Name :
OSMANUV
Model Number :
Specification
Certification :
ISO9001
Place of Origin :
CHINA
MOQ :
1 SET
Price :
Negotiation
Supply Ability :
Negotiation
Delivery Time :
30 days
Packaging Details :
WOOD PACKAGING
Coating Durability :
High Durability
Light Source :
IR light
Usage :
Paper Printer Label Printer Card Printer
Coating Thickness :
Adjustable
Model :
OSM-XT-450T
Productive Capacity :
4800pcs/8h
Key Selling Points :
Pulp Molded Coating
Working Power :
2.4kw
Description
FULLY AUTOMATIC 24-SPIN PROCESSOR FOR R&D TO PRODUCTION | CUSTOMIZABLE DISPENSE & SPIN SPEED
This 24-station spin coater is designed for automated, high-throughput thin-film deposition. Each of the 24 independent coating positions can be loaded with substrates up to 200 mm diameter (or 156×156 mm square). The system sequentially completes dispense, acceleration, spin-hold, and edge-bead removal steps via a customizable recipe database.
Key Advantages
  • Zero cross-contamination - individual bowls and exhaust for each station
  • High uniformity < ±3% at 3000 rpm across all stations
  • Full customization - substrate material (Si, glass, polymer, metal), gas purging (N₂, clean dry air), and post-spin rinse steps
Technical Parameters
ParameterStandard ValueCustomizable Range
Number of stations2412 / 16 / 24 / 32 (customizable)
Max substrate size200 mm diameter or 156×156 mm square50 - 300 mm (customizable chuck)
Spin speed range0 - 6000 rpm0 - 10000 rpm
Speed accuracy±1 rpm--
Spin acceleration200 - 10000 rpm/scustomizable up to 20000 rpm/s
Coating uniformity< ±3% @3000 rpm±2% available
Process gases1 channel (N₂)2 - 4 gas channels (customizable)
Dispense typesStatic / dynamicUp to 3 dispense steps per recipe
Exhaust flow per station45 m³/h30 - 80 m³/h (customizable)
EnvironmentClass 10 cleanroom compatibleClass 1 option
Power supply400V / 50 Hz / 3P208V - 480V (customizable)
Machine dimensions (W×D×H)2100 × 1200 × 1900 mmwidth/depth customizable
Production Line Integration
When integrated into a coating line, the 24-station spin coater typically works with:
  1. Loader / unloader (magazine-to-magazine or cassette-to-cassette) - customizable interface
  2. Pre-alignment station - optional edge/notch alignment
  3. 24-station spin coater - main unit
  4. Edge bead remover (EBR) - integrated or separate station
  5. Post-coating bake plate - hotplate or IR (programmable)
  6. Cooling station - active or passive
  7. Central chemical dispense system - 1-12 bottles with auto-refill
  8. Exhaust & solvent recovery system - customizable for photoresist, PI, PMMA, etc.
Applications
  • Semiconductor - photoresist coating (i-line, KrF, ArF)
  • Perovskite solar cells - large-area uniform deposition
  • OLED / QLED - hole injection/transport layers
  • MEMS & microfluidics - SU-8, PDMS, polymer coatings
  • R &D & pilot line - multi-substrate process development
  • Glass / sapphire / ceramic substrates - surface planarization
  • Lithium battery - slurry coating on separator or electrode
Customization Options
This 24-station spin coater is highly customizable in the following aspects:
  • Substrate size & shape - round, square, rectangle, or custom cutouts
  • Chuck design - vacuum, mechanical clamp, or electrostatic chuck
  • Bowl material - PP, PVDF, PTFE, or stainless steel (for aggressive solvents)
  • Dispense nozzles - up to 3 independent nozzles per station, customizable XY motion
  • Process gases - N₂, clean dry air, Ar, or forming gas
  • Backside rinse & edge bead removal - programmable
  • Recipe library - unlimited storage for 1000+ custom recipes
  • Interface - SMEMA, SECS/GEM, OPC-UA, or Modbus TCP
  • Safety - explosion-proof configuration for flammable solvents
Key Features
  • Independent station monitoring - each station tracks film thickness trend and alarm history
  • Active lid interlock - prevents operation when bowl cover is open
  • Solvent drip catcher - reduces maintenance frequency
  • Fast recipe download - < 1 sec to change all 24 stations
  • Data logging - CSV export per station (spin speed vs. time)
  • Low vibration design - < 0.5 µm/s² at maximum speed
  • Energy-saving mode - exhaust speed automatically reduced when idle
Support and Services
  • Remote installation guidance - video call setup included
  • 24/7 technical support - engineering team on call (English/Chinese)
  • On-site training - optional (3 days)
  • 12-month warranty - extendable to 36 months
  • Spare parts availability - 5 years guaranteed
  • Process development support - free recipe optimization for your material
Packing and Shipping
ItemMethod
PackingVacuum-sealed + anti-static foam + plywood crate (VCI corrosion protection)
Shipping termFOB / CIF / DDP (choose at quote)
Lead time45 - 60 working days (customized: +15 days)
Transport40' HC container (1 unit per container) or air freight for urgent orders
DocumentsCommercial invoice, packing list, CE declaration, operation manual (digital + printed)
Frequently Asked Questions
Q1: Can different substrates be coated simultaneously on different stations?
A: Yes, each station runs independently. For example, station 1-6 can coat 4-inch wafers, while station 7-12 coat 6-inch wafers -- fully customizable.
Q2: Does the machine support high-viscosity materials (>1000 cP)?
A: Yes. We provide customizable slow-dispense and high-torque spin motors (up to 1.5 N*m) for thick photoresist or polyimide.
Q3: How long does it take to switch from one photoresist to another?
A: With the optional customizable quick-clean bowl design, changeover < 10 minutes per station. Central chemical lines can be flushed automatically.
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Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination

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Product Detail
Brand Name :
OSMANUV
Model Number :
Specification
Certification :
ISO9001
Place of Origin :
CHINA
MOQ :
1 SET
Price :
Negotiation
Contact Supplier
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Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination
Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination
Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination
Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination
Fully Automatic 24-Station Spin Coater with Customizable Dispense & Spin Speed for High Uniformity and Zero Cross-Contamination

Dongguan Osmanuv Machinery Equipment Co., Ltd

Verified Supplier
6 Years
guangdong, dongguan
Since 2007
Business Type :
Manufacturer
Main Products :
UV Coating Machine, Spray Coating Machine, UV Curing Machine
Total Annual :
2000000-3000000
Employee Number :
150~200
Certification Level :
Verified Supplier
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