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Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃
Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃
Specifications
Brand Name :
Jietai
Model Number :
JTM-100504AD
Certification :
CE, FCC, ROHS, etc.
Place of Origin :
Dongguan, Guangdong
MOQ :
1
Price :
￥800000
Payment Terms :
T/T
Supply Ability :
One unit. It will take 30 to 60 days.
Delivery Time :
30-60work days
Packaging Details :
Packaging: Wooden case, wooden frame, stretch film. Dimensions: 12M*2M*2.8M
Type :
Ultrasonic alkaline washing+Ultrasonic acid washing+Pure water rinsing
Name :
Semiconductor Cleaning Machine
Model :
JTM-100504AD
Overall Dimensions :
12M*2M*2.8M
Cleaning Frequency :
40KHZ/80KHZ
Power :
120KW
Cleaning temperature :
60℃
Number of Tanks :
10
Description
Product Introduction: Semiconductor Silicon Wafer Cleaner​
A precision-engineered solution for semiconductor manufacturing, this ultrasonic cleaning system integrates multi-stage processes to achieve sub-micron level surface purity on silicon wafers—critical for maintaining device performance in advanced node fabrication (down to 5nm).​
Sequential Cleaning Stages:​
  • Ultrasonic Alkaline Scrubbing: Employs 40KHz-80KHz ultrasonic cavitation in alkaline bath to decompose organic contaminants, strip photoresist residuals, and dislodge macro-particles (≥1μm) from wafer surfaces and via structures. The frequency-tunable ultrasonic energy ensures uniform cleaning across 4"-12" wafer diameters, including edge exclusion zones.​
  • Ultrasonic Acid Etching: Utilizes the same frequency range in acidic media to dissolve inorganic impurities—specifically metal ions (Fe, Cu, Zn) and native oxide layers (SiO₂). Cavitation micro-jets penetrate patterned features to remove embedded sub-100nm contaminants, validated by particle counter readings (≤10 particles/wafer for ≥0.1μm).​
  • UPW Rinsing: Final rinse with ultra-pure water (UPW, TOC ≤5ppb) flushes residual chemistries, achieving surface resistivity ≥18.2MΩ·cm—meeting SEMI F20 standards for pre-deposition cleaning.​
Process Parameters:​
  • Frequency Band: 40KHz-80KHz (multi-frequency operation, selectable via HMI for contamination-specific tuning)​
  • Temperature Setpoint: 60℃ (PID-controlled, ±1℃ tolerance) to optimize chemical reaction kinetics without inducing wafer warpage.​
  • Material Compatibility: Wetted components in PFA (perfluoroalkoxy) and sapphire to prevent metallic ion leaching, ensuring zero cross-contamination.​
Fab Integration Advantages:​
  • Compatible with FOUP/SMIF pod loading for automated cassette handling, reducing human intervention​
  • Cleanroom-class design (ISO 5) with HEPA-filtered exhaust to maintain Class 1 environment compliance​
  • Recipe storage for 50+ cleaning protocols, adaptable to bare wafers, SOI wafers, and epi-wafers​
Application: Essential for pre-litho, post-CMP, and post-etch cleaning in logic, memory, and MEMS fabrication lines.​
Keywords: Semiconductor wafer ultrasonic cleaner, alkaline-acid sequential cleaning, UPW rinsing, 40-80KHz, 60℃ process, sub-micron decontamination

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃

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Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃

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Product Detail
Brand Name :
Jietai
Model Number :
JTM-100504AD
Certification :
CE, FCC, ROHS, etc.
Place of Origin :
Dongguan, Guangdong
MOQ :
1
Price :
￥800000
Contact Supplier
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Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃

guangdong Jietai Ultrasonic cleaning Equipment Co., Ltd.

Verified Supplier
1 Years
guangdong, dongguan
Since 2005
Business Type :
Manufacturer
Main Products :
Ultrasonic Cleaning Equipment, Electronics Ultrasonic Cleaner, Instrument Ultrasonic Cleaner
Total Annual :
4,397,596.73-6,397,596.73
Employee Number :
460~500
Certification Level :
Verified Supplier
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