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40KHz-80KHz Semiconductor Silicon Wafer Cleaner - Ultrasonic Alkaline/Acid Cleaning + DI Water Rinsing, 60℃
40KHz-80KHz Semiconductor Silicon Wafer Cleaner - Ultrasonic Alkaline/Acid Cleaning + DI Water Rinsing, 60℃
Specifications
Brand Name :
Jietai
Model Number :
JTM-100504AD
Certification :
CE, FCC, ROHS, etc.
Place of Origin :
Dongguan, Guangdong
MOQ :
1
Price :
￥800000
Payment Terms :
T/T
Supply Ability :
One unit. It will take 30 to 60 days.
Delivery Time :
30-60work days
Packaging Details :
Packaging: Wooden case, wooden frame, stretch film. Dimensions: 12M*2M*2.8M
Number of Tanks :
10
Cleaning Frequency :
40KHZ/80KHZ
Type :
Ultrasonic alkaline washing+Ultrasonic acid washing+Pure water rinsing
Name :
Semiconductor Cleaning Machine
Overall Dimensions :
12M*2M*2.8M
Power :
120KW
Cleaning temperature :
60℃
Model :
JTM-100504AD
Description
Product Introduction: Semiconductor Silicon Wafer Cleaning System​
Tailored for semiconductor manufacturing workflows, this precision cleaning system integrates multi-stage ultrasonic processes to achieve ultra-high surface purity of silicon wafers, critical for ensuring device yield and performance in IC fabrication and MEMS processing.​
Core Cleaning Stages:​
  • Ultrasonic Alkaline Cleaning: Utilizes cavitation effect at adjustable frequencies to dissolve organic residues, photoresist remnants, and particulate contaminants from wafer surfaces and microstructures, preparing substrates for subsequent acid treatment.​
  • Ultrasonic Acid Cleaning: Targets inorganic impurities (e.g., metal ions, oxide layers) via frequency-optimized ultrasonic energy, enhancing chemical reactivity to dislodge submicron contaminants embedded in patterned structures or wafer edges.​
  • DI Water Rinsing: Implements high-purity deionized water circulation to eliminate residual chemicals, ensuring surface neutrality and meeting strict conductivity standards (≤18.2MΩ·cm) required for advanced semiconductor processing.​
Technical Parameters:​
  • Ultrasonic Frequency Range: 40KHz-80KHz (multi-band adjustable, enabling precise matching to contamination types and wafer geometries)​
  • Process Temperature: 60℃ (thermostatically controlled to optimize chemical reaction rates while preventing wafer damage)​
  • Material Compatibility: Constructed with PFA-lined tanks and quartz components to resist corrosive chemistries, avoiding secondary contamination.​
Key Advantages:​
  • Achieves sub-50nm particle removal efficiency, compliant with SEMI F020 standards​
  • Frequency-tunable ultrasonic modules adapt to bare wafers, patterned wafers, and thin films​
  • Integrated temperature control ensures consistent cleaning efficacy across batch processing​
  • Seamless integration with upstream wafer handling systems and downstream lithography/etching processes​
Application: Ideal for pre-diffusion, pre-deposition, and post-etch cleaning in 4-inch to 12-inch silicon wafer manufacturing lines.​
Keywords: Semiconductor wafer cleaner, ultrasonic alkaline/acid cleaning, DI water rinsing, 40-80KHz, 60℃ process, silicon wafer surface treatment​

40KHz-80KHz Semiconductor Silicon Wafer Cleaner - Ultrasonic Alkaline/Acid Cleaning + DI Water Rinsing, 60℃40KHz-80KHz Semiconductor Silicon Wafer Cleaner - Ultrasonic Alkaline/Acid Cleaning + DI Water Rinsing, 60℃

40KHz-80KHz Semiconductor Silicon Wafer Cleaner - Ultrasonic Alkaline/Acid Cleaning + DI Water Rinsing, 60℃

40KHz-80KHz Semiconductor Silicon Wafer Cleaner - Ultrasonic Alkaline/Acid Cleaning + DI Water Rinsing, 60℃

40KHz-80KHz Semiconductor Silicon Wafer Cleaner - Ultrasonic Alkaline/Acid Cleaning + DI Water Rinsing, 60℃

40KHz-80KHz Semiconductor Silicon Wafer Cleaner - Ultrasonic Alkaline/Acid Cleaning + DI Water Rinsing, 60℃

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40KHz-80KHz Semiconductor Silicon Wafer Cleaner - Ultrasonic Alkaline/Acid Cleaning + DI Water Rinsing, 60℃

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Product Detail
Brand Name :
Jietai
Model Number :
JTM-100504AD
Certification :
CE, FCC, ROHS, etc.
Place of Origin :
Dongguan, Guangdong
MOQ :
1
Price :
￥800000
Contact Supplier
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40KHz-80KHz Semiconductor Silicon Wafer Cleaner - Ultrasonic Alkaline/Acid Cleaning + DI Water Rinsing, 60℃

guangdong Jietai Ultrasonic cleaning Equipment Co., Ltd.

Verified Supplier
1 Years
guangdong, dongguan
Since 2005
Business Type :
Manufacturer
Main Products :
Ultrasonic Cleaning Equipment, Electronics Ultrasonic Cleaner, Instrument Ultrasonic Cleaner
Total Annual :
4,397,596.73-6,397,596.73
Employee Number :
460~500
Certification Level :
Verified Supplier
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