4.8KW 400V Immersion PFA Frame Heater For Heating Harsh Chemicals
4.8KW Process Tank Ultrapure PTFE/PFA Wetted Surfaces Immersion PFA Frame Heater
Products for Semiconductor Manufacturing and Fabrication
Features & Benefits
- Ultrapure PTFE/PFA wetted surfaces
- Reliable heating of harsh chemicals
- Maximum power in compact footprint
- Maximum 200°C heating capability
- Fast temperature response and efficiency
- Each configuration capable of various voltage-to-wattage combinations
- Integrate easily into most PVDF, PFA, and quartz wet process tanks
- Sizes for many tank dimensions
- Compact height of 1-5/8 inch
- Safety features include hi-limit sensor and encapsulated ground wire
- No N2 purge required
Optional Perforated Grids
- Top grids separate heaters from wafer carriers and components to increase the available tank space
- Bottom grids separate heaters from the tank floor
- Available for all frame sizes
- Adds 1/8 inch to height
Specifications
| Heater Element |
Heating Coil |
| Wetted Surfaces |
PFA/PTFE |
| Wattages |
1.0 - 20 kW |
| Voltages |
120 - 480 VAC
1 or 3 phase |
| Sizes (LxW) |
7x5 to 19x14 inch |
| Height |
1-5/8 inch |
| Temperature |
200°C (392°F) |
| Hi-Limit Sensor |
Type-J thermocouple |
| Ground Wire |
Encapsulated |
| Lead Wire |
15-ft |
Markets
Semiconductor LEDs & Electronics Flat-Panel Displays Photovoltaic / Solar Life Sciences Industrial Pharmaceutical Biomedical Aerospace
Applications
Fluid Heating