Square perimeter heating PTFE Trame Immersion Heater For Semiconductor Ultra High Purity Heating
PFA Frame heaters are the perfect solution for heating harsh chemicals or DI water to constant temperatures in ultrapure tanks, including PVDF, PFA, and quartz tanks. Their PFA/PTFE wetted surfaces are ideal for use in high-purity applications where chemical compatibility is of utmost importance. PFA immersion tank heater provide high-efficiency heating with superior temperature control and maximum power output in a compact footprint. The heaters are available in various sizes that easily fit new and existing systems common to semiconductor, solar, MEMs, and other technological industries.
Features & Benefits
- Ultrapure PTFE/PFA wetted surfaces
- Reliable heating of harsh chemicals
- Maximum power in compact footprint
- Maximum 200°C heating capability
- Fast temperature response and efficiency
- Each configuration capable of various voltage-to-wattage combinations
- Integrate easily into most PVDF, PFA, and quartz wet process tanks
- Sizes for many tank dimensions
- Compact height of 1-5/8 inch
- Safety features include hi-limit sensor and encapsulated ground wire
- No N2 purge required
Specifications
| Heater Element |
Heating Coil |
| Wetted Surfaces |
PFA/PTFE |
| Wattages |
1.0 - 20 kW |
| Voltages |
120 - 480 VAC
1 or 3 phase |
| Sizes (LxW) |
7x5 to 19x14 inch |
| Height |
1-5/8 inch |
| Temperature |
200°C (392°F) |
| Hi-Limit Sensor |
Type-J thermocouple |
| Ground Wire |
Encapsulated |
| Lead Wire |
15-ft |
Optional Perforated Grids
- Top grids separate heaters from wafer carriers and components to increase the available tank space
- Bottom grids separate heaters from the tank floor
- Available for all frame sizes
- Adds 1/8 inch to height
Industries
- Semiconductor Fabrication
- Solar Cell Manufacturing
- Flat-Panel Display, LEDs & Electronics
- Chemicals Manufacturing
- Industrial Manufacturing
Point Of Use Heating
Point of Use (POU) Heating refers to the energy-efficient method of placing small heaters near processing baths to reduce heat-up wait times.
Applications:
- Semiconductor Wafer Cleaning
- Etching
- Inline Chemical Heating
- Point of Use Heating (POU)
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