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Scratches Dusts Inspection Surface Defect Detection Equipment In IC Chip Industry
Scratches Dusts Inspection Surface Defect Detection Equipment In IC Chip Industry
Specifications
Brand Name :
ZEIT
Model Number :
SDD-ICC-X—X
Certification :
Case by case
Place of Origin :
Chengdu, P.R.CHINA
MOQ :
1set
Price :
Case by case
Payment Terms :
T/T
Supply Ability :
Case by case
Delivery Time :
Case by case
Packaging Details :
Wooden case
Size :
Customizable
Customizable :
Available
Guarantee period :
1 year or case by case
Shipping Terms :
By Sea / Air / Multimodal Transport, etc
Description

Surface Defect Detector in Integrated Circuit Chip Industry

Applications

For the process control and yield management of blank mask in the fields of integrated circuit chip manufacturing,

we can help glass substrate and mask manufacturers to identify and monitor the mask defects, reduce the risk of

yield and improve their independent ability of R&D for core technologies.

Working Principle

The defects on the mask surface can be automatically detected from three aspects: optics system performance,

camera performance and motion platform performance.

Features

Model SDD-ICC-X—X

Performance detection

 Detectable defect type Scratches, Dusts
Detectable defect size 1μm
Detection accuracy (measured)

100% detection of defects / collection of

defects (scratches, dust)
Detection efficiency

≤10 minutes

( Measured value : 350mm x 300mm Mask)

Optical System Performance

 Resolution 1.8μm
Magnification 40x
Field of view 0.5mm x 0.5mm
Blue light illumination 460nm, 2.5w

Motion Platform Performance

X, Y two-axis motion

Marble countertop flatness: 2.5μm

Y-axis Z-direction runout precision: ≤ 10.5μm

Y-axis Z-direction runout precision: ≤8.5μm
Note: Customized production available.

Detection Images

Scratches Dusts Inspection Surface Defect Detection Equipment In IC Chip Industry

Our Advantages

We are manufacturer.

Mature process.

Reply within 24 working hours.

Our ISO Certification

Scratches Dusts Inspection Surface Defect Detection Equipment In IC Chip Industry

Parts Of Our Patents

Scratches Dusts Inspection Surface Defect Detection Equipment In IC Chip IndustryScratches Dusts Inspection Surface Defect Detection Equipment In IC Chip Industry

Parts Of Our Awards and Qualifications of R&D

Scratches Dusts Inspection Surface Defect Detection Equipment In IC Chip IndustryScratches Dusts Inspection Surface Defect Detection Equipment In IC Chip Industry

Product tags

wafer inspection

,

raw material inspection quality control

,

pcb inspection system
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Scratches Dusts Inspection Surface Defect Detection Equipment In IC Chip Industry

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Product Detail
Brand Name :
ZEIT
Model Number :
SDD-ICC-X—X
Certification :
Case by case
Place of Origin :
Chengdu, P.R.CHINA
MOQ :
1set
Price :
Case by case
Contact Supplier
Scratches Dusts Inspection Surface Defect Detection Equipment In IC Chip Industry

ZEIT Group

Active Member
4 Years
sichuan, chengdu
Since 2018
Business Type :
Manufacturer, Exporter, Seller
Main Products :
Optical Coating Equipment, Optical Testing Equipment, Photomask Substrate
Total Annual :
＄10,000,000-＄15,000,000
Employee Number :
120~200
Certification Level :
Active Member
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