

|
Model
|
SGL-0690
|
SGL-1015
|
SGL-1220
|
SGL-1530
|
SGL-0610
|
SGL-1120
|
|
|
|||||||
|
Working volume(mm)
|
600*600*900
|
1000*1000*1500
|
1200*1200*2000
|
1500*1500*3000
|
600*1000
|
1100*2000
|
1300*2000
|
1500*2000
|
|||||||
|
Ultimate temperature(℃)
|
1800
|
1800
|
1800
|
1800
|
1800
|
1800
|
1800
|
1800
|
|||||||
|
Temperature uniformity(℃)
|
±5
|
±7.5
|
±10
|
±15
|
±7.5/±10
|
±10/±15
|
±10/±15
|
±15/±20
|
|||||||
|
Ultimate vacuum(Pa)
|
50
|
50
|
50
|
50
|
50
|
50
|
50
|
50
|
|||||||
|
PRESSURE RISE RATE(Pa/h)
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
|||||||
|
Heating method
|
resistance
|
resistance
|
resistance
|
resistance
|
resistance/induction
|
resistance/induction
|
resistance/induction
|
resistance/induction
|
|||||||
|
Processing atmosphere
|
vaccum/nitrogen/hydrogen
|
|
|
|
|
|
|
|
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