

|  			 Model  			 |  			 			 SGL-0690  			 |  			 			 SGL-1015  			 |  			 			 SGL-1220  			 |  			 			 SGL-1530  			 |  			 			 SGL-0610  			 |  			 			 SGL-1120  			 |  			 			 |  			 			 |  		|||||||
|  			 Working volume(mm)  			 |  			 			 600*600*900  			 |  			 			 1000*1000*1500  			 |  			 			 1200*1200*2000  			 |  			 			 1500*1500*3000  			 |  			 			 600*1000  			 |  			 			 1100*2000  			 |  			 			 1300*2000  			 |  			 			 1500*2000  			 |  		|||||||
|  			 Ultimate temperature(℃)  			 |  			 			 1800  			 |  			 			 1800  			 |  			 			 1800  			 |  			 			 1800  			 |  			 			 1800  			 |  			 			 1800  			 |  			 			 1800  			 |  			 			 1800  			 |  		|||||||
|  			 Temperature uniformity(℃)  			 |  			 			 ±5  			 |  			 			 ±7.5  			 |  			 			 ±10  			 |  			 			 ±15  			 |  			 			 ±7.5/±10  			 |  			 			 ±10/±15  			 |  			 			 ±10/±15  			 |  			 			 ±15/±20  			 |  		|||||||
|  			 Ultimate vacuum(Pa)  			 |  			 			 50  			 |  			 			 50  			 |  			 			 50  			 |  			 			 50  			 |  			 			 50  			 |  			 			 50  			 |  			 			 50  			 |  			 			 50  			 |  		|||||||
|  			 PRESSURE RISE RATE(Pa/h)  			 |  			 			 0.67  			 |  			 			 0.67  			 |  			 			 0.67  			 |  			 			 0.67  			 |  			 			 0.67  			 |  			 			 0.67  			 |  			 			 0.67  			 |  			 			 0.67  			 |  		|||||||
|  			 Heating method  			 |  			 			 resistance  			 |  			 			 resistance  			 |  			 			 resistance  			 |  			 			 resistance  			 |  			 			 resistance/induction  			 |  			 			 resistance/induction  			 |  			 			 resistance/induction  			 |  			 			 resistance/induction  			 |  		|||||||
|  			 Processing atmosphere  			 |  			 			 vaccum/nitrogen/hydrogen  			 |  			 			 |  			 			 |  			 			 |  			 			 |  			 			 |  			 			 |  			 			 |  		|||||||