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​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​
​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​
​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​
​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​
​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​
​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​
​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​
​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​
Specifications
Brand Name :
ZMSH
Model Number :
Wafer Orientation Instrument
Certification :
rohs
Place of Origin :
CHINA
MOQ :
3
Price :
by case
Payment Terms :
T/T
Supply Ability :
1000pcs per month
Delivery Time :
3-6 months
Packaging Details :
package in 100-grade cleaning room
X-ray System​​ :
X-ray Tube
Sample Size :
Wafer: 2–12 inch; Ingot: ≤200 mm (diameter) × 500 mm (length)
Angular Range :
θ: -10° to +50°, 2θ: -10° to +110°
Orientation Accuracy :
±10″–±30″ (high-precision models: ±3″)
Multi-axis Motion :
X/Y/Z-axis positioning, 360° rotation ±15°, tilt control
Scanning Speed :
Full orientation in 10 sec (fully automated)
Applications :
​​Semiconductor Manufacturing​​, Optical Material Processing​​
Description

Wafer Orientation Instrument Equipment Overview​

​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​

​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​

A wafer orientation instrument is a high-precision device based on ​​X-ray diffraction (XRD)​​ technology, designed for semiconductor and optical material industries to determine crystal lattice orientation and cutting angles. Its core components include:

  • ​​X-ray Generation System​​: Copper or molybdenum target X-ray tubes with focal spot size 0.4×1 mm, tube voltage 30–50 kV, and tube current 0–5 mA.
  • ​​Goniometer​​: Dual-axis (Ω-θ) linkage design supporting ±0.001° angular resolution and rocking curve analysis.
  • ​​Sample Stage​​: V-groove or planar alignment structure, compatible with 2–12-inch wafers and large ingots (≤20 kg).
  • ​​Automation Module​​: Stacking device for simultaneous positioning of 12 ingots, enhancing production efficiency.

Comprehensive Technical Specifications of Wafer Orientation Instrument


​​Parameter Category​​ ​​Parameter​​ ​​Specifications/Description​​
​​X-ray System​​


 X-ray Tube Copper (Cu) target, focal spot 0.4×1 mm, air-cooled
X-ray Voltage/Current 30 kV, 0–5 mA adjustable
Detector Type Geiger-Müller tube (low energy) or scintillation counter (high energy)
Time Constant 0.1/0.4/3 sec adjustable
​​Goniometer​​



 Sample Size Wafer: 2–12 inch; Ingot: ≤200 mm (diameter) × 500 mm (length)
Angular Range θ: -10° to +50°, 2θ: -10° to +110°
Orientation Accuracy ±10″–±30″ (high-precision models: ±3″)
Angular Resolution Minimum reading: 1″ (digital) or 10″ (scale)
Scanning Speed Full orientation in 10 sec (fully automated)
​​Automation & Control​​

 Sample Stage V-groove (2–8 inch wafers), edge/OF alignment, 1–50 kg capacity
Multi-axis Motion X/Y/Z-axis positioning, 360° rotation ±15°, tilt control
Interface PLC/RS232/Ethernet, MES-compatible
​​Physical Specifications​​


 Dimensions 1130×650×1200 mm (L×W×H)
Weight 150–300 kg
Power Requirements Single-phase 220V±10%, 50/60 Hz, ≤0.5 kW
Noise Level <65 dB (operating)
​​Advanced Features​​

 Closed-loop Tension Control Real-time monitoring, 0.1–1.0 MPa tension regulation
AI-driven Optimization Defect detection, predictive maintenance alerts
Multi-material Compatibility Supports cubic (Si), hexagonal (sapphire), and asymmetric crystals (YAG)

Wafer Orientation Instrument Working Principle

​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​

The device operates through ​​X-ray diffraction​​ and ​​Omega scanning​​ technologies:

​​1. X-ray Diffraction​​:

  • X-rays incident on the crystal surface at Bragg angles generate diffraction signals, enabling calculation of lattice spacing and orientation.
  • Rocking curve scanning evaluates lattice defects and surface strain.

​​

2. Omega Scanning​​:

  • The crystal rotates around a fixed axis while X-ray tube and detector remain stationary, dynamically collecting multi-angle diffraction data for full lattice mapping in 5 seconds.
  • Integrated X/Y/Z-axis motion enables 3D crystallographic orientation.

​​

​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​

3. Automated Control​​:

  • PLC or computer-controlled sample rotation and data acquisition, supporting preset cutting parameters (e.g., 8° or 32° cuts for silicon wafers).

Wafer Orientation Instrument Key Features & Advantages​

​​Feature​​

​​Description​​

​​Technical Parameters/Case Studies​​

​​Ultra-High Precision​​

Omega scanning accuracy ±0.001°, Rocking Curve FWHM resolution <0.005°

Silicon carbide wafer cutting error ≤±0.5°

​​High-Speed Measurement

​​

Single-scan acquisition of all crystallographic data, 200× faster than manual

Silicon wafer batch testing: 120 wafers/hour

​​Multi-Material Compatibility

​​

Supports cubic (Si), hexagonal (sapphire), and asymmetric crystals (YAG)

Applicable materials: SiC, GaN, quartz, garnet

​​AI Integration​​

Deep learning algorithms for defect detection, real-time process optimization

Defect sorting reduces scrap rate to <1%

​​Modular Design​​

Expandable X-Y platform for 3D mapping or EBSD integration

Silicon wafer dislocation density detection ≤100 cm⁻²

Wafer Orientation Instrument Application Fields​

​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​

1. Semiconductor Manufacturing​​:

  • ​​Silicon Wafer Cutting​​: Determines <100> and <111> orientations, minimizing cutting loss (<5%).
  • ​​Silicon Carbide (SiC) Wafers​​: 8° off-cut process enhances device breakdown voltage, loss rate <10%.

2. ​​Optical Material Processing​​:

  • ​​Sapphire Substrates​​: Cuts LED chips with ±0.1° precision to reduce light efficiency loss.
  • ​​YAG Laser Crystals​​: Precise cutting of laser resonator surfaces for superior beam quality.

3. ​​High-Temperature Alloys & Ceramics​​:

  • ​​Turbine Blades​​: Nickel-based alloy orientation control improves high-temperature resistance (>1200°C).
  • ​​Zirconia Ceramics​​: Cuts smartphone backplates with thickness uniformity ±0.02 mm.

4. ​​Research & Quality Control​​:

  • ​​Crystal Defect Analysis​​: Maps dislocation density via rocking curves (<10³ cm⁻²).
  • ​​New Material R&D​​: Evaluates perovskite solar cell lattice orientation for photovoltaic efficiency.

Wafer Orientation Instrument FAQ

1. Q: How to calibrate a wafer orientation instrument?​​

​​ A:​​ Calibration involves aligning the X-ray source and detector using reference crystals, typically requiring ​​<0.001° angular accuracy​​ and automated software adjustments for precision.

​​2. Q: What is the typical accuracy of a wafer orientation instrument?​​

​​ A:​​ High-end models achieve ​​±0.001° precision​​, critical for semiconductor wafer cutting and crystal defect analysis in industries like photovoltaics and advanced ceramics.

Tags: #Wafer Orientation Instrument, #XRD-Based, #Sapphire, #SiC, #High-Precision Cutting, # Angle Determination​​

​

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​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​

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Product Detail
Brand Name :
ZMSH
Model Number :
Wafer Orientation Instrument
Certification :
rohs
Place of Origin :
CHINA
MOQ :
3
Price :
by case
Contact Supplier
​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​
​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​
​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​
​​XRD-Based Wafer Orientation Instrument for High-Precision Cutting Angle Determination​​

SHANGHAI FAMOUS TRADE CO.,LTD

Verified Supplier
8 Years
shanghai, shanghai
Since 2013
Business Type :
Manufacturer, Agent, Importer, Exporter, Trading Company
Main Products :
Gallium Nitride Wafer, Sapphire Wafer, SiC Substrate
Total Annual :
1000000-1500000
Certification Level :
Verified Supplier
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