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High-Precision Rotary Voice Coil Motor For Semiconductor Wafer Inspection Equipment
High-Precision Rotary Voice Coil Motor For Semiconductor Wafer Inspection Equipment
High-Precision Rotary Voice Coil Motor For Semiconductor Wafer Inspection Equipment
High-Precision Rotary Voice Coil Motor For Semiconductor Wafer Inspection Equipment
High-Precision Rotary Voice Coil Motor For Semiconductor Wafer Inspection Equipment
High-Precision Rotary Voice Coil Motor For Semiconductor Wafer Inspection Equipment
Specifications
Brand Name :
SUPT MOTION
Model Number :
VARS series
Certification :
ISO9001-2000
Place of Origin :
China,Suzhou
MOQ :
1PCS
Price :
$102-$210
Payment Terms :
T/T
Supply Ability :
Negotiable
Delivery Time :
1-5pcs ,5 days . >20pcs ,To be negotiated
Packaging Details :
Carton packaging etc.
Weight :
65g
Length :
81mm
Voltage :
8.4V
Product Model :
VARS0120-020-00A
Peak force :
1.2N-m
Total stroke :
20°
Type :
Micro Motor
Housing Material :
Aluminum
Motion Type :
Rotary
Description
Product Description:
High-precision vacuum radiation-resistant rotary voice coil motor, specifically designed for the harsh environment of semiconductor wafer inspection, can operate stably under a vacuum of 10⁻⁶ Pa and strong radiation. The motor uses special radiation-resistant insulation materials, with windings free of organic volatiles to avoid contaminating the wafer surface. It supports continuous rotation at multiple angles and precise angle positioning, used for driving inspection probes to adjust orientation. The non-contact rotation structure ensures no wear and no particle generation, meeting the cleanroom requirements of the semiconductor industry. Torque output is smooth, positioning accuracy reaches ±0.08°, and response speed is fast, making it suitable for wafer defect inspection, dimensional measurement, and other equipment to improve inspection efficiency and data accuracy, supporting the automation upgrade of semiconductor production lines.

Features:

  • Product Name: Rotary Voice Coil Motor
  • Weight: 65g
  • Size: 81*73.4*32mm
  • Name: Rotary Voice Coil Motor
  • Stroke: 20°
  • Life: 10000h
  • Vacuum level: 10⁻⁶ Pa
  • Radiation tolerance: ≥10⁵ Gy
  • Positioning accuracy: ±0.08°
  • Torque range: 1.2 N·m
  • Rotation speed: 100-800 r/min
  • Protection rating: IP67 (vacuum sealed)
  • Special Feature: Curved Voice Coil Motor, Rotating VCM, Rotary Voice Coil Motor

Technical Parameters:

Parameters Details
Type Rotary Voice Coil Motor (Rotary VCM, Rotary voice coil Actuator)
Warranty 1 Year
Stroke 20°
Peak torque 1.2N-m
Noise Low
Size 81*73.4*32mm
Length 81mm
Speed High
Weight 65g
Voltage 8.4V
Product Model
Peak torque
(N-m)		 Continuos torque
at 25℃(N-m)		 Total Stroke
degrees
( degree)		 Max Voltage
(V)		 Back EMF Constant
(V/m/s)		 Weight of the coil(g) Length
(mm)		 Width
(mm)		 Height
(mm)
VARS0008-026-00A 0.08 0.05 26 6.4 0.05 11.7 35 39.8 36.1
VARS0017-090-00A 0.17 0.1 90 11.1 0.1 17.8 70 41.5 39
VARS0022-032-00A 0.22 0.12 32 15.5 0.16 21.5 60 60 36
VARS0042-040-00A 0.42 0.38 40 3.5 0.12 38 82 53.6 30.3
VARS0077-020-00A 0.77 0.63 20 6.7 0.24 66 75 50 30
VARS0084-030-00A 0.84 0.6 30 6.3 0.2 50.4 75 48.9 30.6
VARS0120-020-00A 1.2 0.5 20 8.4 0.67 65 81 73.4 32
VARS0350-060-00A 3.5 1.6 60 26.3 0.4 350 ∮169.6 ∮169.6 63
VARS0706-014-00A 7.1 2.1 14 52.4 1.03 225.5 115 65 54.5
VARS4520-030-00A 45.2 19 30 71.5 4.3 1350 ∮240 78

Applications:

In wafer defect inspection and chip packaging processes, rotary voice coil motors, with angular positioning accuracy within ±0.1°, drive inspection probes to perform high-frequency, small-amplitude rotational scans across the wafer surface. Its design without mechanical transmission structures eliminates backlash errors, and combined with millisecond-level response speed, it can precisely capture the fine details of chip circuitry, achieving nanometer-level defect detection and providing core support for yield control in semiconductor manufacturing.

High-Precision Rotary Voice Coil Motor For Semiconductor Wafer Inspection Equipment

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High-Precision Rotary Voice Coil Motor For Semiconductor Wafer Inspection Equipment

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Product Detail
Brand Name :
SUPT MOTION
Model Number :
VARS series
Certification :
ISO9001-2000
Place of Origin :
China,Suzhou
MOQ :
1PCS
Price :
$102-$210
Contact Supplier
High-Precision Rotary Voice Coil Motor For Semiconductor Wafer Inspection Equipment
High-Precision Rotary Voice Coil Motor For Semiconductor Wafer Inspection Equipment
High-Precision Rotary Voice Coil Motor For Semiconductor Wafer Inspection Equipment

Suzhou Unite Precision Technology Co., Ltd.

Verified Supplier
4 Years
jiangsu, suzhou
Since 2005
Business Type :
Manufacturer, Trading Company
Main Products :
VCM Voice Coil Motor, Linear Voice Coil Motor, Rotary Voice Coil Motor
Total Annual :
40-80
Employee Number :
30~60
Certification Level :
Verified Supplier
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