High-Precision Reflective Fiber Optic Sensor for Industrial Automation
The KEYENCE FU-67(5000) is a state-of-the-art reflective fiber optic sensor designed for critical industrial applications requiring ultra-fine detection and robust performance. With a minimum detectable object of 0.005 mm (gold wire diameter) , this sensor delivers unparalleled precision for tasks such as semiconductor wafer inspection, micro-component alignment, and medical device assembly. Its parallel detection arrangement and M6-sized housing ensure compact integration into confined spaces, while the Tough-Flex fiber with a 2 mm minimum bend radius withstands repeated flexing in high-vibration environments. The sensor operates across a wide temperature range of -40°C to +50°C , making it suitable for extreme industrial conditions. Ideal for applications where reliability and accuracy are non-negotiable, the FU-67(5000) combines advanced optical technology with KEYENCE’s signature durability.
Long-Range Detection with IP67 Environmental Protection
Engineered for challenging industrial settings, the FU-67(5000) offers multi-mode detection ranges (e.g., 210 mm in FINE mode, 900 mm in MEGA mode) , adaptable to various target distances. Its IP67-rated housing provides full protection against dust, water immersion, and oil splashes, ensuring consistent performance in harsh environments like automotive manufacturing or food processing plants. The sensor’s 2-meter free-cut fiber allows flexible installation, while the stainless steel jacket enhances resistance to abrasion and chemical exposure. Complementing these features, the hex-shaped design simplifies mounting and cable routing, reducing setup time and minimizing maintenance costs.
Versatile Solutions for Semiconductor and Precision Industries
The FU-67(5000) excels in specialized applications demanding both sensitivity and durability. In semiconductor production, it detects sub-millimeter defects on wafers and monitors thin-film deposition with 0.005 mm resolution . For industrial automation, its parallel beam configuration and wide dynamic range enable reliable detection of small parts on high-speed conveyor lines. The sensor’s compatibility with KEYENCE FS series amplifiers allows seamless integration into existing systems, supporting analog voltage (0–10 V) or digital NPN/PNP outputs. With CE and RoHS compliance , the FU-67(5000) meets global standards for safety and environmental sustainability, making it a trusted choice for engineers worldwide.
Attribute | Value |
Model | FU-67(5000) |
Brand | KEYENCE |
Type | Reflective Fiber Optic Sensor (Industrial Automation) |
Detection Range | 210–900 mm (Multi-mode operation: FINE=210 mm, MEGA=900 mm) |
Minimum Detectable Object | 0.005 mm (Gold wire diameter) |
Fiber Type | Tough-Flex stainless steel jacket with 2 mm minimum bend radius |
Fiber Unit Length | 2 m (Free-cuttable) |
Fiber Unit Diameter | ø2.2 × 2 mm |
Housing Size | M6 (Hexagonal design for easy mounting) |
Environmental Rating | IP67 (Dust/water resistance, oil splash protection) |
Temperature Range | -40°C to +50°C (-40°F to 122°F) |
Output Signal | NPN/PNP or analog voltage (0–10 V) (Depends on amplifier model) |
Certifications | CE, RoHS |
Applications | - Semiconductor wafer inspection - Micro-component alignment - High-speed conveyor systems - Medical device assembly - High-vibration environments |
Features | - 0.005 mm ultra-fine resolution - IP67-rated durability - -40°C to +50°C extreme temperature tolerance - Tough-Flex fiber for harsh conditions - Parallel beam configuration - CE/RoHS compliance |
Weight | Approximately 21 g |
Packaging & Shipping

Company Information
Xiamen ZhiCheng Automation Technology Co., Ltdit is a leading global supplier of control system components. We specialize in control systems and drives.
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