GaN-on-Si(111) N/P Ttype substrate Epitaxy 4inch 6inch 8inch for LED or Power device
GaN-on-Si (111) substrates are essential in high-performance electronics and optoelectronics due to their wide bandgap, high electron mobility, and thermal conductivity. These substrates leverage silicon's cost-effectiveness and scalability, enabling large-diameter wafers. However, challenges like lattice mismatch and thermal expansion differences between GaN and Si (111) must be addressed to reduce dislocation density and stress. Advanced epitaxial growth techniques, such as MOCVD and HVPE, are employed to optimize crystal quality. GaN-on-Si (111) substrates are widely used in power electronics, RF devices, and LED technology, offering a balance of performance, cost, and compatibility with existing semiconductor manufacturing processes.
Gallium Nitride on Silicon (GaN-on-Si) is a substrate technology that combines the properties of Gallium Nitride (GaN) with the cost-effectiveness and scalability of Silicon (Si). GaN-on-Si substrates are particularly popular in power electronics, RF devices, and LEDs due to their unique properties. Below are some key properties and advantages of GaN-on-Si substrates:
GaN-on-Si substrates offer a cost-effective solution for integrating the high-performance properties of GaN with the large-scale manufacturability of silicon, making them a critical technology in various advanced electronic applications.
Parameter Category | Parameter | Value/Range | Remarks |
---|---|---|---|
Material Properties | Bandgap of GaN | 3.4 eV | Wide bandgap semiconductor, suitable for high-temperature, high-voltage, and high-frequency applications |
Bandgap of Si | 1.12 eV | Silicon as a substrate material offers good cost-effectiveness | |
Thermal Conductivity | 130-170 W/m·K | Thermal conductivity of GaN layer; silicon substrate is approximately 149 W/m·K | |
Electron Mobility | 1000-2000 cm²/V·s | Electron mobility in the GaN layer, higher than in silicon | |
Dielectric Constant | 9.5 (GaN), 11.9 (Si) | Dielectric constants of GaN and Si | |
Thermal Expansion Coefficient | 5.6 ppm/°C (GaN), 2.6 ppm/°C (Si) | Mismatch in thermal expansion coefficients of GaN and Si, potentially causing stress | |
Lattice Constant | 3.189 Å (GaN), 5.431 Å (Si) | Lattice constant mismatch between GaN and Si, potentially leading to dislocations | |
Dislocation Density | 10⁸-10⁹ cm⁻² | Typical dislocation density in the GaN layer, depending on epitaxial growth process | |
Mechanical Hardness | 9 Mohs | Mechanical hardness of GaN, providing wear resistance and durability | |
Wafer Specifications | Wafer Diameter | 2-inch, 4-inch, 6-inch, 8-inch | Common sizes for GaN on Si wafers |
GaN Layer Thickness | 1-10 µm | Depending on specific application needs | |
Substrate Thickness | 500-725 µm | Typical thickness of the silicon substrate for mechanical strength | |
Surface Roughness | < 1 nm RMS | Surface roughness after polishing, ensuring high-quality epitaxial growth | |
Step Height | < 2 nm | Step height in the GaN layer, affecting device performance | |
Wafer Bow | < 50 µm | Wafer bow, influencing process compatibility | |
Electrical Properties | Electron Concentration | 10¹⁶-10¹⁹ cm⁻³ | n-type or p-type doping concentration in the GaN layer |
Resistivity | 10⁻³-10⁻² Ω·cm | Typical resistivity of the GaN layer | |
Breakdown Electric Field | 3 MV/cm | High breakdown field strength in the GaN layer, suitable for high-voltage devices | |
Optical Properties | Emission Wavelength | 365-405 nm (UV/Blue) | Emission wavelength of GaN material, used in LEDs and lasers |
Absorption Coefficient | ~10⁴ cm⁻¹ | Absorption coefficient of GaN in the visible light range | |
Thermal Properties | Thermal Conductivity | 130-170 W/m·K | Thermal conductivity of GaN layer; silicon substrate is approximately 149 W/m·K |
Thermal Expansion Coefficient | 5.6 ppm/°C (GaN), 2.6 ppm/°C (Si) | Mismatch in thermal expansion coefficients of GaN and Si, potentially causing stress | |
Chemical Properties | Chemical Stability | High | GaN has good corrosion resistance, suitable for harsh environments |
Surface Treatment | Dust-free, contamination-free | Cleanliness requirement for the GaN wafer surface | |
Mechanical Properties | Mechanical Hardness | 9 Mohs | Mechanical hardness of GaN, providing wear resistance and durability |
Young's Modulus | 350 GPa (GaN), 130 GPa (Si) | Young's modulus of GaN and Si, affecting the mechanical properties of the device | |
Production Parameters | Epitaxial Growth Method | MOCVD, HVPE, MBE | Common epitaxial growth methods for GaN layers |
Yield Rate | Depends on process control and wafer size | Yield is influenced by factors such as dislocation density and wafer bow | |
Growth Temperature | 1000-1200°C | Typical temperature for GaN layer epitaxial growth | |
Cooling Rate | Controlled cooling | Cooling rate is usually controlled to prevent thermal stress and wafer bow |
GaN-on-Si substrates are primarily used in several key applications:
Power Electronics: GaN-on-Si is widely used in power transistors and converters due to its high efficiency, fast switching speeds, and ability to operate at high temperatures, making it ideal for power supplies, electric vehicles, and renewable energy systems.
RF Devices: GaN-on-Si substrates are employed in RF amplifiers and microwave transistors, particularly in 5G communications and radar systems, where high power and frequency performance are crucial.
LED Technology: GaN-on-Si is used in the production of LEDs, especially for blue and white LEDs, offering cost-effective and scalable manufacturing solutions for lighting and displays.
Photodetectors and Sensors: GaN-on-Si is also utilized in UV photodetectors and various sensors, benefiting from GaN’s wide bandgap and high sensitivity to UV light.
These applications highlight the versatility and importance of GaN-on-Si substrates in modern electronics and optoelectronics.
Q:Why GaN over si?
A:GaN on Si offers a cost-effective solution for high-performance electronics, combining the advantages of GaN's wide bandgap, high electron mobility, and thermal conductivity with the scalability and affordability of silicon substrates. GaN is ideal for high-frequency, high-voltage, and high-temperature applications, making it a superior choice for power electronics, RF devices, and LEDs. Silicon substrates enable larger wafer sizes, reducing production costs and facilitating integration with existing semiconductor manufacturing processes. Although there are challenges like lattice mismatch and thermal expansion differences, advanced techniques help mitigate these issues, making GaN on Si a compelling option for modern electronic and optoelectronic applications.
Q:What is GaN-on-Si?
A:GaN-on-Si refers to gallium nitride (GaN) layers grown on a silicon (Si) substrate. GaN is a wide bandgap semiconductor known for its high electron mobility, thermal conductivity, and ability to operate at high voltages and temperatures. When grown on silicon, it combines the advanced properties of GaN with the cost-effectiveness and scalability of silicon. This makes GaN-on-Si ideal for applications in power electronics, RF devices, LEDs, and other high-performance electronic and optoelectronic devices. The integration with silicon allows for larger wafer sizes and compatibility with existing semiconductor manufacturing processes, although challenges like lattice mismatch need to be managed.