MachineU > China Products > Machinery
99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity
99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity
99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity
99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity
99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity
99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity
99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity
99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity
Specifications
Brand Name :
GNEE
Certification :
SGS
Place of Origin :
CHINA
MOQ :
≥1sets
Payment Terms :
MoneyGram,Western Union,T/T,D/P,D/A,L/C
Supply Ability :
25 every month
Packaging Details :
Customer's Requst/customization
Control Power Supply :
0.2kw 220v 50Hz
Oxygen Output :
≤50 Nm3/hr
Net Weight :
22KG
Product Type :
Oxygen Generator
Oxygen Dew Point :
-40℃ Or -60℃
Process Form :
pressure swing adsorption （PSA）
Model No :
PSA Oxygen Generator
Skid Mounted :
yes
Outlet Pressure :
4~5.5bar Adjustable
Use :
Hospitals
Description

Product Description

PSA Oxygen Generator (Pressure Swing Adsorption Oxygen Generator) is a key clean equipment in the semiconductor manufacturing industry. Based on high-precision Pressure Swing Adsorption (PSA) technology, it achieves deep purification through double-layer molecular sieves (ordinary molecular sieves + high-purity molecular sieves) to produce high-purity oxygen with a concentration of over 99.5%. It features core advantages such as stable purity, high cleanliness, reliable operation, and zero pollutant emissions, which can meet the stringent requirements for oxygen purity and cleanliness in processes such as oxidation and thin film deposition during semiconductor manufacturing. As the top-tier configuration for psa oxygen plant purity, the impurities (nitrogen, moisture, carbon dioxide, etc.) in the oxygen produced by this equipment are all controlled below the ppm level, avoiding a decrease in chip yield caused by insufficient oxygen purity. It is an indispensable core oxygen supply equipment for semiconductor manufacturing.

Product Parameters

Output (Nm3/h)

Effective gas consumption ( Nm3/min )

Air cleaning system

Inlet/outlet caliber(mm)

5

0.78

KJ-1

DN25

DN15

10

1.75

KJ-2

DN25

DN15

20

3.55

KJ-6

DN40

DN15

30

5.25

KJ-6

DN40

DN25

40

7.0

KJ-10

DN50

DN25

50

8.7

KJ-10

DN50

DN25

60

10.5

KJ-12

DN50

DN32

80

13.75

KJ-20

DN65

DN40

100

16.64

KJ-20

DN65

DN40

150

24.91

KJ-30

DN80

DN40

200

33.37

KJ-40

DN100

DN50

300

49.82

KJ-60

DN125

DN50


99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity

99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity

99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity

I. Why Does Semiconductor Manufacturing Require Extreme Oxygen Purity?

Semiconductor manufacturing represents the pinnacle of precision manufacturing, with chip processes having entered the nanometer scale (5nm, 3nm). Any tiny impurities may cause chip short circuits, performance degradation, or yield reduction. Oxygen is mainly used in core processes such as oxidation (forming SiO₂ insulation layers) and Chemical Vapor Deposition (CVD) in semiconductor manufacturing. Oxygen purity directly affects the uniformity of insulation layer thickness, film adhesion, and chip electrical performance.
Ordinary industrial-grade oxygen (93% purity) contains impurities such as nitrogen and moisture that can form defects on the chip surface, leading to a 10-20% decrease in yield; in contrast, 99.5% high-purity oxygen can control impurity content below the ppm level, effectively avoiding defect formation and ensuring chip yield remains stable above 90%. The double-layer molecular sieve adsorption technology of the PSA Oxygen Generator can deeply remove impurities such as nitrogen, moisture, and carbon dioxide from the air. Its psa oxygen plant purity control precision far exceeds that of traditional oxygen generation equipment, fully meeting the process requirements of semiconductor manufacturing.
In addition, semiconductor manufacturing has extremely high requirements for oxygen cleanliness. The output gas must meet Class 100 cleanroom classification (no more than 100 particles ≥0.5μm per cubic foot of air). The PSA Oxygen Generator is equipped with a high-efficiency gas filtration system that can filter tiny particles in oxygen, avoiding particle contamination on the chip surface and further ensuring chip quality.

Procurement Guide: Core Selection Criteria for the Semiconductor Industry

When purchasing PSA Oxygen Generator, semiconductor enterprises must adhere to four core principles: "qualified purity, cleanroom compatibility, stability and reliability, and complete supplier qualifications".
In terms of purity, it is imperative to select equipment with oxygen purity ≥99.5% and impurity content meeting semiconductor process requirements, and require suppliers to provide third-party test reports (such as SGS, ITS);
In terms of cleanroom compatibility, it is necessary to confirm that the output gas cleanliness of the equipment is ≥Class 100 and the equipment casing meets cleanroom installation requirements; in terms of stability and reliability, priority should be given to products with continuous operation time ≥8,000 hours/year and warranty for core components ≥3 years.
Supplier qualifications are crucial. It is necessary to select enterprises with psa based oxygen plant production qualifications, ISO9001 quality management system certification, and relevant semiconductor industry certifications (such as SEMI certification), and require them to provide successful cases in the semiconductor industry (such as cooperation cases with chip manufacturing and semiconductor packaging and testing enterprises). In addition, after-sales service must meet the high requirements of the semiconductor industry. Suppliers should be able to provide 24/7 technical support, regular on-site maintenance, and rapid spare parts supply to ensure long-term stable operation of the equipment.
With its 99.5% high-purity advantage, the PSA Oxygen Generator has become a benchmark for clean oxygen supply in semiconductor manufacturing. Its precise purity control, clean gas output, and stable operating performance can provide reliable oxygen supply support for semiconductor processes, making it a key equipment for chip manufacturing enterprises to improve yield and reduce costs.

In addition to PSA Oxygen Generators, we also produce VPSA Oxygen Generators, storage tanks, heat exchangers and other products. If you are interested in VPSA Oxygen Systems or other products, please feel free to send an email to info@gneeheatex.com. We will be very happy to serve you.

Send your message to this supplier
Send Now

99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity

Ask Latest Price
Product Detail
Brand Name :
GNEE
Certification :
SGS
Place of Origin :
CHINA
MOQ :
≥1sets
Payment Terms :
MoneyGram,Western Union,T/T,D/P,D/A,L/C
Supply Ability :
25 every month
Contact Supplier
99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity
99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity
99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity
99.5% High-Purity PSA Oxygen Generator for Semiconductor Manufacturing psa oxygen plant purity

Henan Gnee New Materials Co., Ltd.

Verified Supplier
4 Years
henan, anyang
Since 2012
Business Type :
Manufacturer, Trading Company
Main Products :
Cryogenic Storage Tank, Fuel Oil Storage Tank, LPG Gas Storage Tank
Total Annual :
100000-200000
Employee Number :
100~150
Certification Level :
Verified Supplier
Discover similar products
View More

Find Similar Products By Category:

Supplier Homepage Products PSA Oxygen Generator
MachineU China Products Machinery
Contact Supplier
Submit Requirement