Zirconia Ceramics The Essential Component For Wafer Handling And Positioning Systems In Semiconductor Equipment

Product Overview

This product is a high-performance cylindrical rod meticulously engineered from yttria-stabilized zirconia (YTZP) ceramic. It features a monolithic design with a slender shaft and a precision-machined circular boss at one end. The entire component boasts a mirror-smooth, untextured surface, ensuring consistent performance and reliability. It leverages the superior properties of zirconia ceramic to excel in extreme conditions involving high wear, high temperature, and corrosion, making it a critical component for enhancing the reliability and longevity of precision machinery.

Primary Applications

This versatile rod is ideally suited for demanding applications across various industries:

• Precision Guidance Systems: Used as linear guide rods, shafts, or bushings in automation equipment and high-precision machine tools, ensuring smooth, accurate movement even without lubrication.

• Fluid Control Valves: Serves as a core valve core or plunger in metering pumps, chemical valves, or fuel injection systems, offering exceptional corrosion and wear resistance for long-term sealing integrity.

• Sensor Probes & Sheaths: Acts as a probe or protective sheath for sensors in high-temperature, corrosive, or electrically insulating environments, guaranteeing accurate signal transmission.

• Semiconductor Equipment Components: Employed in wafer handling and positioning systems due to its high purity, temperature resistance, and anti-static properties.

Key Advantages

• Exceptional Wear Resistance: Extreme hardness (HRA ≥88) results in a service life far exceeding metals and plastics, significantly reducing downtime and maintenance costs.

• Excellent High-Temperature Stability: Capable of operating reliably in temperatures up to 800°C, with low thermal expansion for superior dimensional stability.

• Superior Corrosion Resistance: Resists attack from a wide range of acids, alkalis, and salts, making it suitable for harsh chemical environments.

• High Strength & Toughness: Transformation toughening provides outstanding flexural strength and fracture toughness, offering excellent resistance to mechanical shock.

• Low Friction Coefficient: The smooth surface ensures low friction, enabling smooth operation and reducing power loss.

• Electrical Insulation: Excellent electrical insulation properties ideal for precision measurement and sensing applications requiring isolation.

Specifications Table

Manufacturing Process

Raw material preparation (high-purity zirconia powder) → Cold Isostatic Pressing (CIP) / Injection Molding → Green Machining (pre-sintering machining) → High-Temperature Sintering (>1500°C) → Precision Centerless Grinding (diameter & straightness) → Ultra-Fine Grinding & Polishing → Comprehensive Dimensional Inspection & Non-Destructive Testing → Clean Packaging.

Usage Instructions

1. Careful Handling: Despite its toughness, it is a brittle material. Avoid dropping, colliding, or applying improper bending stress during handling and installation.

2. Proper Installation: Ensure proper alignment in the support seat to avoid localized stress concentration. Use non-metallic tools for assembly.

3. Environment Compatibility: While highly corrosion-resistant, verify material suitability for specific extreme chemical environments (e.g., hot concentrated acids).

After-Sales Service

We offer a 12-month warranty against manufacturing defects. We also provide professional technical consultation, custom sizing, and application solutions to ensure optimal performance.

Frequently Asked Questions (FAQ)

• Q: What is the maximum achievable length for this rod?

  • A: Maximum length is constrained by sintering technology to prevent deformation. Manufacturing becomes more challenging with high length-to-diameter ratios. Please contact us with your specific requirements for feasibility assessment.

• Q: What are the advantages of Zirconia (YTZP) rods compared to Silicon Carbide (SiC) rods?

  • A: The key advantage of YTZP is its superior fracture toughness and impact resistance compared to SiC. SiC offers higher hardness and thermal conductivity but is more brittle. The choice depends on whether impact or pure wear is the primary concern.

• Q: Can the boss be customized to other shapes or with threaded holes?

  • A: Yes. We support custom designs for the boss, including different shapes and mounting holes. However, sharp internal corners and threads require careful structural strength evaluation.