MF4608-R2-10-V-A MF4608-R2-20-V-A MEMS-based Thermal Mass Flow Sensor for Industrial Process Control Laboratory Research
Key Features:
- Direct Mass Flow Measurement: No temperature/pressure compensation needed for stable accuracy.
- High Rangeability: 100:1 turndown ratio via multi-sensing MEMS elements.
- Flexible Output: Analog voltage + RS485 Modbus for easy system integration.
- User-Friendly Design: LED display + front buttons for on-site parameter configuration.
- Rotameter Compatibility: Drop-in replacement for mechanical rotameters.
- Low Power Consumption: < 100 mA at 12 VDC for battery-powered systems.
- Data Logging: Records max/min flow and over-range events.
Applications:
- Industrial Process Control: Gas blending, welding gas flow monitoring, and chemical reaction gas metering.
- Laboratory Research: Analytical instrument gas supply (GC, HPLC) and calibration gas flow control.
- Medical Devices: Oxygen concentrators, ventilators, and anesthesia machine gas flow monitoring.
- Environmental Monitoring: Stack gas sampling and emission monitoring systems.
- Fuel Cell Systems: Hydrogen/air flow metering for performance optimization.
- Pneumatic Systems: Compressed air consumption tracking and leak detection.
| Flow Range |
0-10 SLPM (standard); 0-20/0-50 SLPM optional |
| Measurement Principle |
Thermal mass flow (MEMS sensing chip, no temp/pressure compensation) |
| Accuracy |
±2.5% reading + 0.5% full scale (FS) |
| Repeatability |
±0.2% FS |
| Linearity |
±0.5% FS |
| Response Time (t90) |
< 1 s |
| Output Signal |
analog voltage (0-5 VDC or 1-5 VDC, factory-set to 0-5 VDC) |
| Communication Interface |
RS485 Modbus RTU (default baud rate: 9600, 8N1) |
| Power Supply |
8-24 VDC (typical 12 VDC); current consumption < 100 mA |
| Operating Temperature |
-10°C to +50°C |
| Operating Humidity |
15-90% RH (non-condensing) |
| Operating Pressure |
86-106 kPa |
| Display |
LED digital (instant flow, accumulated total, unit: SLPM/SCCM) |
| Mechanical Interface |
1/4" NPT or 6 mm tube fitting (rotameter-compatible) |
| Weight |
~ 120 g |
| Dimensions |
ø50 mm × 120 mm (length × diameter) |
| Certifications |
CE, RoHS compliant |
| Service Life |
> 5 years (normal operation) |
