FS1015CL-100-ISO-C MEMS Mass Flow Sensor for Medical Ventilators & Anesthesia Machines Respiratory Therapy Equipment
| Flow Range | 0 ~ 100 SLPM |
| Accuracy | ±(2.0 + 0.5% FS) % |
| Repeatability | ±0.5% of reading |
| Supply Voltage | 5.0 V DC ±5% (4.75~5.25 V) |
| Output Signal | Analog linear: 0.5 ~ 4.5 V DC |
| Response Time | ≤8 ms (max) |
| Operating Temp | -10°C ~ +55°C |
| Operating Humidity | 10~95% RH (non-condensing) |
| Media | Clean, dry gases |
| Max Pressure | 0.2 MPa (2 bar / 30 psi) |
| Pressure Loss | ~1300 Pa @ 100 SLPM |
