AS200A008C100CJCC Gas Mass Flow Controller Use for Semiconductor Manufacturing Process
Typical Applications
Semiconductor processing, CVD, gas distribution systems, laboratory gas control, analytical instruments, etc.
Specification:
| Leak rate | 1×10⁻¹⁰ Pa·m³/s (He) |
| Pressure resistance | 3 MPa |
| AS200 Product Series | MEMS Gas Mass Flow Controller |
| A (Seal Type) | A = Rubber seal; Signal: 0–5V analog input/output |
| 008 (Gas Code) | 008 corresponds to the specified gas |
| C (Range Unit) | C = SCCM (Standard Cubic Centimeters per Minute) |
| 100 (Full Scale) | 100 SCCM |
| CJCC | Suffix for interface, valve type, electrical, and fitting combination |
