5 Holes Quartz Glass Plate 127x127x3mm for 5-Inch Wafer Calibration

This 5 holes quartz glass calibration plate is a high-precision semiconductor equipment calibration tool. With dimensions of 127x127x3mm and five precisely machined positioning holes, it matches standard 5-inch wafer specifications for daily equipment verification and calibration across prober, AOI, die bonder and optical metrology applications.

Product Parameters

Key Features

• 5 Precise Positioning Holes – Five locating holes with tight tolerance for equipment coordinate calibration, replacing daily silicon wafer verification.
• Ultra-High Flatness – Double-side precision polished surface with minimal thermal deformation for consistent calibration accuracy.
• Chemical Cleaning Resistance – Resistant to standard semiconductor cleaning solvents, maintaining dimensional stability after repeated cleaning cycles.
• Optical Uniformity – Low stress quartz glass ensures uniform optical transmission for AOI and vision inspection systems.
• Long-Term Stability – Stable precision over long-term repeated use, designed as a dedicated semiconductor industry calibration standard.

Applications

1. Semiconductor Wafer Inspection

Master calibration plate for 5-inch wafer flatness and dimension verification. Five locating holes enable daily equipment coordinate calibration, replacing standard silicon wafer checkpoint routines. AOI optical inspection reference plate for lens focus and recognition accuracy calibration.

2. Packaging & Probing Process

Prober station positioning reference plate for probe position verification and platform flatness check via the five-hole layout. Die bonder and placement machine alignment calibration, correcting mechanical fixture positioning deviation.

3. Optical Metrology Laboratory

Standard calibration plate for vision measuring machines and contour testers, used for regular equipment measurement accuracy verification.

4. Automated Production Line Fixture Calibration

Semiconductor automated equipment tooling calibration standard, designed for repeated cleaning without deformation in production environments.

Advantages over Regular Glass

Unlike regular glass plates, this quartz glass calibration plate features double-side precision polishing with extremely low surface deformation. The five-hole coaxiality and bore diameter are tightly controlled within strict tolerances. Resistant to semiconductor standard cleaning chemicals, it delivers stable precision over long-term repeated use—making it the industry-standard calibration part for semiconductor applications.