Product Overview

The High Purity Fused Silica Quartz Boat is a precision-formed high-temperature carrier engineered for tube furnace sintering, semiconductor processing, and laboratory thermal applications. Manufactured through integral hot-forming for uniform wall thickness and fine-polished surfaces, it delivers outstanding thermal stability up to 1100°C, superior chemical resistance to hydrofluoric acid and concentrated corrosive reagents, and zero impurity precipitation — ensuring contamination-free processing for the most demanding industrial and research environments.

Key Features

• Integral Hot-Forming: One-piece construction ensures uniform wall thickness, structural integrity, and eliminates weak joints or seams
• 1100°C High Temperature Resistance: Maintains dimensional stability and mechanical strength under prolonged high-temperature operation in tube furnaces
• HF & Strong Chemical Resistance: Outstanding chemical durability against hydrofluoric acid, concentrated acids, strong alkalis, and organic solvents
• Excellent Thermal Shock Stability: Low thermal expansion coefficient (CTE 5.5 x 10^-7/°C) prevents cracking during rapid heating-cooling cycles
• Zero Impurity Precipitation: SiO2 > 99.99% purity guarantees no metal ion leaching, protecting wafer and sample integrity
• Precision Finish: Surface fine-polished with standardized dimensions, smooth edges, and no chipping for safe sample handling

Applications

Competitive Advantages

vs. Borosilicate Glass Boat: Borosilicate glass cannot withstand hydrofluoric acid and softens at high temperatures; this quartz boat resists strong corrosion and maintains mechanical integrity through repeated 1100°C thermal cycling without deformation or cracking

vs. Alumina/Ceramic Boat: Superior thermal shock resistance enables rapid heating-cooling; transparent wall allows visual process monitoring; zero metal impurity eliminates wafer and sample contamination risk

Specifications