The Coated Glass Carrier Stage is a precision optical platform with a diameter of 150mm and a thickness of 6mm, featuring an optical coating treatment on the surface. Built on a high-flatness, bubble-free glass substrate, the stage delivers stable light transmission and reflection performance for demanding optical and semiconductor applications. The coating layer is uniform with strong adhesion, providing reliable performance under repeated handling and high-temperature operation. With tight machining tolerance and scratch-free surface design, the carrier stage protects workpieces during loading, transport and processing, making it an ideal platform for wafer carrying, optical testing and vacuum coating fixtures.

• Uniform coating with strong adhesion: The optical coating is applied evenly and bonds firmly to the substrate, ensuring consistent optical behavior across the surface.
• High-flatness bubble-free substrate: The precision substrate provides a level, defect-free base that keeps measurements and handling stable.
• Stable light transmission and reflection: The coated surface delivers repeatable optical performance, supporting accurate inspection and measurement.
• Wear and corrosion resistant: The durable surface withstands cleaning agents and mechanical contact without degrading performance.
• Controllable coating precision: Coating thickness and uniformity are precisely controlled to meet specific optical and application requirements.

The Coated Glass Carrier Stage is designed for semiconductor, optical and vacuum processing systems that require a stable, coated platform. It is widely used as a semiconductor wafer carrier, providing a flat and clean surface that supports wafers securely during inspection and processing. In metrology and quality control, the stage serves as an optical testing platform, offering consistent transmission and reflection characteristics for reliable measurements. The component is also adopted as a vacuum coating fixture, holding substrates and workpieces in position during thin-film deposition. Additionally, the stage functions as a suction carrier for optical components, where its flat coated surface enables stable vacuum chucking without scratching delicate parts.

• Controllable coating precision: Coating parameters are tuned to deliver exact optical performance for each application.
• Tight machining tolerance: Diameter, thickness and flatness are controlled within narrow limits for dependable fit and alignment.
• Peel-resistant coating at high temperature: The coating maintains strong adhesion even under elevated temperature operating conditions.
• Scratch-free to workpieces: The smooth, finished surface protects wafers and optical components from damage during handling.