Techncial data
| Model No. | EV-3020 |
| Travel-X.Y axis | 300*200(mm) |
| Travel-Z axis | 200mm |
| Resolution | 0.5µm |
| X,Y-axis accuracy | (2.5+L/200)µm |
| Repeatability | 0.003mm |
| Stage load capacity | 20kg |
| Zoom lens |
Optical: 0.7-4.5x Video on monitor: 23x-190x |
| Camera | High resolution CCD camera |
| Illumination |
Contour illumination: LED light Surface illumination: LED ring light |