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PECVD Graphite Fittings Isostatic Graphite Material Solid Block
PECVD Graphite Fittings Isostatic Graphite Material Solid Block
Specifications
color :
black
Place of Origin :
China
Brand Name :
Fangda
Certification :
Iso9001
MOQ :
1 piece
Packaging Details :
Plywood case
Shape :
solid block
Material :
isostatic graphite
Description

PECVD Graphite – Industrial-Grade Description

PECVD graphite is a high-performance graphite component specifically engineered for plasma-enhanced chemical vapor deposition (PECVD) processes. Manufactured from ultra-high purity, fine-grained graphite, it provides excellent thermal stability, uniform conductivity, and low impurity levels critical for contamination-sensitive environments. Its optimized microstructure ensures consistent plasma interaction and uniform film deposition across substrates. With low thermal expansion and strong resistance to thermal shock, PECVD graphite maintains dimensional integrity under rapid temperature cycling. Optional surface coatings further enhance oxidation resistance and lifespan. Widely used in semiconductor manufacturing and thin-film deposition systems, it ensures precise process control, repeatability, and long-term operational reliability.

Grade Bulk Density (g/cm³) Electric Resistivity (μΩ·m) Compressive Strength (MPa) Flexural Strength (MPa) Shore Hardness Ash Content (ppm) Purified Ash: Graphitization (ppm) Purified Ash: Product (ppm) Coeff. of Thermal Expansion (*10⁻⁶/°C) Thermal Conductivity W/(m·K) Young's Modulus (GPa) Applications
CDI-1A 1.85 10-13 90 45 60 300 50 5 5.5 133 11.5 Semiconductor, Heat zone in PV Industry, Ceramic Sintering, Vacuum furnace
CDI-1B 1.8 10-13 86 40 55 300 50 5 5.4 121 10 Semiconductor, Heat zone in PV Industry, Ceramic Sintering, Vacuum furnace
CDI-1C 1.82 11-15 100 48 58 300 50 5 5.6 120 10.6 Semiconductor, Heat zone in PV Industry, Ceramic Sintering, Vacuum furnace
CDI-1D 1.75 12-16 80 40 58 300 50 5 5.8 108 10 Semiconductor, Heat zone in PV Industry, Ceramic Sintering, Vacuum furnace

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PECVD Graphite Fittings Isostatic Graphite Material Solid Block

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Product Detail
color :
black
Place of Origin :
China
Brand Name :
Fangda
Certification :
Iso9001
MOQ :
1 piece
Packaging Details :
Plywood case
Contact Supplier
PECVD Graphite Fittings Isostatic Graphite Material Solid Block

Chengdu Carbon Material Co.,Ltd.

Verified Supplier
1 Years
sichuan, chengdu
Since 1993
Business Type :
Manufacturer
Main Products :
EDM Graphite Electrodes, Graphite Thermal Field, Graphite Fittings
Employee Number :
700~1000
Certification Level :
Verified Supplier
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