


Category | Item | Specification | |
Product Name | Benchtop Dual-Target Magnetron Sputtering Coater with Stainless Steel Chamber | ||
Model | LR-CK103 | ||
Sample Stage | Dimensions | φ100 mm | |
Adjustable Rotation Speed | ≤20 rpm | ||
Magnetron Target Guns | Equipped with two 2-inch magnetron targets; target dimensions: 50.8 mm diameter, ≤3 mm thickness | ||
Vacuum Chamber | Chamber Dimensions | φ273 mm × 280 mm | |
Observation Window | Front-facing | ||
Chamber Material | 304 Stainless Steel | ||
Opening Mechanism | Top lid and front door | ||
Vacuum System | Roughing Pump | Two-stage rotary vane pump | |
Molecular Pump | High-speed turbomolecular pump | ||
Vacuum Measurement | Compound vacuum gauge | ||
Vacuum Port | ISO63 | ||
Exhaust Port | KF16 | ||
System Ultimate Vacuum | 1.0 × 10⁻⁴ Pa | ||
Power Supply | AC 220V, 50/60 Hz | ||
Pumping Speed | Roughing pump speed: 1.1 L/s | ||
Output Power | DC power supply: 500 W | ||
Other Parameters | Input Voltage | AC 220V, 50 Hz | |
Total System Power | 2 kW | ||
Overall Dimensions | 710 × 480 × 580 mm | ||
