| Unit | FJ-700 | |
| Flange(In) | DN160 CF | |
| DN160 ISO-K | ||
| Flange(Out) | ISO-KF | DN40 |
| Pumping Speed | l/s | N2:700 |
| He:580 | ||
| H2:260 | ||
| Ar:680 | ||
| Compression Ratio | N2:109 | |
| He:107 | ||
| H2:106 | ||
| Ar:109 | ||
| Ultimate Pressure | Pa | CF:6×10-8 |
| ISO-K:6×10-7 | ||
| recommended forevacuum pressure | Pa | 100 |
| forevacuum pump | RVP-6( default ) | |
| Cooling Type,Standard | Water/Air | |
| Cooling Water Consumpyion | L/min | >1 |
| Cooling Water Temperature | ℃ | ≤25 |
| Input voltage/ frequency | V/Hz | 380±20/50 |
| Environment temperature (℃) | Water cooling | 5℃-40℃ |
| mounting position | Vertical | |
| Controller Model | FD-ⅡB/TCDP-Ⅱ | |
| L*W*H | mm | 550×690×850(water) |
| Weight | kg | 135 |