Advantages:
◆ Schottky field emission gun
◆ Multi-stage high performance lens system
◆ High beam stability
◆ Customizable extra-large sample chamber
◆ Simple operation
◆ Rich extensibility and high cost performance
Specifications:
| Item | EM8010 | |
| Resolution | 
			 SE 1.5nm@15kV   BSE 3nm@30kV 
			 | 
		|
| Magnification | 
			 1x-600000x 
			 | 
		|
| Electron Gun | Schottky Field Emission Gun | |
| Accelerating Voltage | 
			 0.2kV-30kV 
			 | 
		|
| 
			 Vacuum System 
			 | 
			
			 2 Ion Pumps, 1 Magnetic Levitation Turbo Molecular Pump, 1 Dry Pump 
			 | 
		|
| Objective Aperture | Molybdenum aperture adjustable outside vacuum system | |
| Specimen Stage | Five axes stage | |
| Travel | X(Auto) | 0 ~ 80mm | 
| Range | Y(Auto) | 0 ~ 50mm | 
| Z(Manual) | 0 ~ 30mm | |
| R(Manual) | 360° | |
| T(Manual) | -5° ~ 70° | |
| Max Specimen Diameter | 175mm | |
| Detector | 
			
			
  | 
		|
| Modification | Stage Upgrade;EBL;STM;AFM;Heating Stage;Cryo Stage;Tensile Stage;Micro-nano manipulator;SEM+Coating Machine;SEM+Laser | |
| Accessories | 
			 EDS/EBSD/STEM/CL/Heating Stage/Cooling Stage / Tensile Stage, etc. 
			 | 
		|