Specifications
Brand Name :
KYKY
Model Number :
CXF-200/1401E
Certification :
CE
Place of Origin :
China
MOQ :
1
Payment Terms :
T/T, L/C
Delivery Time :
4weeks
Packaging Details :
Wooden box for overseas shipment
Pumping Speed :
1401L/s
lubrication :
Maglev
Flange :
ISO-F/CF 200
Cooling :
Water
name :
industrial on board 1401l/s turbomolecular vacuum pump
keyword :
turbomolecular vacuum pump
Description

Maglev Pump , CXF-200/1401 , Water cooling , On board

The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation.

The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.

Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.

The advantages:

1. Zero friction during operation, and low power consumption

2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps

3. Capable of extracting corrosive gases for long term

4. High safety and long service life due to protection of bearings with precision ceramic balls

5. power generating function in case of sudden power-off

Specifications:

Model CXF-200/1401
Pump Speed(l/s,Air) 1400
Compression Ratio >1×107
Ultimate Vacuum(Pa) ≤2×10-6
Inlet Flange DN200 ISO K(LF)
DN200 ISO F
DN200 ISO CF
Outlet Flange KF 40
Rotation Speed(rpm) 33000
Run-up Time(min) 6
VIB (mm) <0.05
Backing Pump (L/s) 15
Mounting or ientation Any
Cooling method Water
Weight(kg)(With Controller) 51

Applications:

Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.

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On Board 1401l/S Turbomolecular Vacuum Pump Industrial

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Brand Name :
KYKY
Model Number :
CXF-200/1401E
Certification :
CE
Place of Origin :
China
MOQ :
1
Payment Terms :
T/T, L/C
Contact Supplier
On Board 1401l/S Turbomolecular Vacuum Pump Industrial
On Board 1401l/S Turbomolecular Vacuum Pump Industrial
On Board 1401l/S Turbomolecular Vacuum Pump Industrial
On Board 1401l/S Turbomolecular Vacuum Pump Industrial

KYKY TECHNOLOGY CO., LTD.

Site Member
7 Years
beijing, beijing
Since 1958
Business Type :
Manufacturer
Employee Number :
>500
Certification Level :
Site Member
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