What is a Cleanroom?
A cleanroom (or Clean Room) is an enclosed space that employs air filtration and pollutant control technologies to eliminate contaminants such as particulate matter, harmful gases, and microorganisms, while precisely regulating environmental parameters including temperature, humidity, pressure, and airflow distribution. Its core function is to provide a controlled, ultra-clean environment for precision manufacturing and scientific research. Key features include:
I. Core Functions and Technical Features
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Pollution Control Capability
- Utilizes high-efficiency filtration systems (e.g., HEPA/ULPA filters) to remove particles ≥0.3 μm with ≥99.97% efficiency, achieving ISO Class 5 (formerly Class 100) or higher cleanliness standards
- Employs positive or negative pressure systems to prevent external contamination or contain hazardous internal substances (for biosafety applications)
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Multi-Parameter Synergistic Control
- Dynamically regulates temperature (±0.5°C accuracy), humidity (±5% RH accuracy), airflow velocity (0.3–0.5 m/s laminar flow), pressure differential (5–20 Pa), and lighting/noise levels
- Ensures uniform airflow distribution via plenum chambers to prevent particle deposition caused by turbulence
II. Classification Standards and Applications
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Cleanliness Grading
- Based on the U.S. Federal Standard FS 209E, classifications include Class 1 (≤1 particle/ft³ ≥0.5 μm), Class 10 (≤10 particles/ft³), and up to Class 100,000
- Integrated circuit manufacturing requires better than Class 1,000 cleanliness, while biopharmaceutical operations typically demand Class 100 (ISO Class 5)
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Industry-Specific Adaptations
- Electronics Industry: Chip manufacturing and semiconductor packaging require Class 1–100 cleanliness to prevent electrostatic discharge and particulate contamination
- Biopharmaceuticals: Sterile drug production and cell culture rely on Class 100 cleanliness and microbial control
- Precision Optics: Lens coating and laser component assembly necessitate vibration-free, temperature- and humidity-stable environments
III. Infrastructure and Core Components
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Core Systems
- Air Handling Unit: Includes primary/medium-efficiency pre-filters, HEPA filters, fans, and plenum chambers
- Environmental Control System: Temperature/humidity control units, differential pressure sensors, and laminar airflow devices
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Ancillary Facilities
- Anti-static flooring, airtight doors/windows, UV sterilization lamps, and air showers (personnel decontamination passages)
IV. Differences from Conventional Laboratories
Cleanrooms achieve contamination-sensitive operations through comprehensive dynamic control of all parameters, whereas conventional laboratories focus only on temperature, humidity, or single variables. For example, nanoscale processing of electronic components requires simultaneous control of particles (≤10 particles/ft³), static electricity (≤100 V), and temperature fluctuations (≤±0.3°C)
Technical Data
Cleanliness Level | Maximum Allowable Dust Number/Cubic Meter | Maximum Allowable Number of Microorganism |
/ | ≥0.5um | ≥5um | Airborne Microbe/Cubic Meter | Settling Microbe Number/Vessel·30min |
100 | 3500 | 0 | 5 | 1 |
10000 | 350000 | 2000 | 100 | 3 |
100000 | 3500000 | 20000 | 500 | 10 |
300000 | 10500000 | 60000 | / | 15 |

