Fan Filter Unit (FFU) with Diffuser Plate
A Fan Filter Unit (FFU) with a diffuser plate is an integrated cleanroom terminal air supply device that combines high-efficiency filtration with airflow homogenization. Its core structure and working principle are as follows:
Key Components
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Housing & Fan
- Constructed from galvanized aluminum-zinc steel, stainless steel, or aluminum alloy.
- Equipped with a centrifugal fan for airflow generation, available in AC/DC power options.
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High-Efficiency Filter (HEPA/ULPA)
- Filtration efficiency ≥99.99% for 0.3μm particles.
- Some models use liquid-sealed designs for enhanced airtightness.
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Diffuser Plate (Air Distribution Plate)
- Typically made of powder-coated aluminum or stainless steel.
- Installed at the outlet to ensure uniform airflow distribution (0.45 m/s ±20%), reducing turbulence and noise.
Applications
- Semiconductor/Electronics Industry: Used in ISO Class 3-9 cleanrooms (Class 1 to million-level).
- Biopharmaceutical: Achieves localized Class 100 cleanliness when used with laminar flow hoods.
- Food/Cosmetics: Meets ISO Class 8 (100,000-level) cleanroom requirements.
Advantages
- Modular Design: Allows multiple units to be connected for different room sizes and ceiling heights.
- Low Maintenance: Diffuser plates are removable for cleaning, and filters are easy to replace.