
|
Model
|
JT-SHL-118
|
|
JT-SHL-226
|
|
JT-SHL-385
|
|
JT-SHL-804
|
|
|||||||
|
Furnace Structure
|
horizontal
|
|
|
|
|
|
|
|
|||||||
|
Constant Temperature Zone Size
|
Φ500mm*600mm
|
|
Φ600mm*800mm
|
|
Φ700mm*1000mm
|
|
Φ800mm*1600mm
|
|
|||||||
|
Furnace Body
|
The inner and outer double-layer water cooling structure, the contact part of the cooling water made of 304 stainless steel, effectively prevent furnace body from gas leakage
|
|
|
|
|
|
|
|
|||||||
|
Sublimation System
|
Heating zone is composed of induction coil, heavy corundum, graphite hard felt and isostatic graphite. And collection area is composed of 310S stainless steel and insulation layer.
|
|
|
|
|
|
|
|
|||||||
|
Temperature Control System
|
PLC touch screen centralized control , automatic control with network port
|
|
|
|
|
|
|
|
|||||||
|
Heating System
|
induction heating, IGBT power supply with low noise, about 15% energy saving than thyristor
|
|
|
|
|
|
|
|
|||||||
|
Vacuum System
|
multistage vacuum pump, vacuum valve, pressure controller and pipelines
|
|
|
|
|
|
|
|
|||||||
|
Cooling System
|
closed cooling system, internal circulation with deionized water, external circulation with tap water, automatic water refill, fan heat dissipation
|
|
|
|
|
|
|
|
|||||||













