Specifications
Price :
200-500 yuan/kg
Brand Name :
KEGU
Place of Origin :
China
Payment Terms :
L/C,D/A,D/P,T/T,,
Supply Ability :
2,000 pcs/month
Packaging Details :
Strong wooden box for Global shipping
Model Number :
Customizable
Material :
SiC
Composition:SiC :
>85%
Color :
Black
Density :
≥3.0g/cm3
Max. Service Temp :
1380℃
Flexural Strength :
250MPa
Description
Silicon Carbide (SiC) Furnace Components | Paddles, Boats & Tubes for Semiconductor & Solar
Our Silicon Carbide (SiC) Furnace Components provide advanced ceramic solutions for demanding semiconductor and solar manufacturing processes. Engineered to withstand extreme temperatures up to 1900°C, these high-purity components deliver superior thermal shock resistance, exceptional mechanical strength, and contamination-free performance - offering significantly longer service life and higher throughput compared to traditional quartz alternatives.
Core Product Line & Applications
  • SiC Paddle: Robust wafer boat holder for diffusion processes
  • SiC Boat: Wafer carrier for boron/phosphorus diffusion in discrete semiconductor manufacturing
  • SiC Dragon Wafer Boat: Specialized holder for high-temperature diffusion applications
  • SiC Process Tube: Critical component for diffusion furnace systems
High-Performance Silicon Carbide Furnace Components with Extreme Temperature Resistance, Superior Mechanical Strength, and Exceptional Thermal Management High-Performance Silicon Carbide Furnace Components with Extreme Temperature Resistance, Superior Mechanical Strength, and Exceptional Thermal Management High-Performance Silicon Carbide Furnace Components with Extreme Temperature Resistance, Superior Mechanical Strength, and Exceptional Thermal Management
Key Technical Advantages
  • Extreme Temperature Performance: Maintains structural integrity and chemical stability at 1900°C operating temperatures
  • Superior Mechanical Properties: High flexural strength (up to 420 MPa) prevents deformation under heavy thermal loads
  • Exceptional Thermal Management: Outstanding thermal shock resistance ensures reliability during rapid thermal cycling
  • Ultra-High Purity Construction: Resists acid/alkali corrosion, preventing wafer contamination in sensitive processes
  • Optimized Thermal Conductivity: Ensures uniform temperature distribution for consistent process results
Technical Performance Specifications
Performance Parameter UNIT HS-A HS-P HS-XA
Grain Size μm 4-10 4-10 4-10
Density g/cm³ ≥3.1 3.0-3.1 >3.1
Hardness (Knoop) Kg/mm² 2800 2800 2800
Flexural Strength @ RT MPa 385 240 420
Compressive Strength @ RT MPa 3900 - 3900
Modulus of Elasticity @ RT GPa 410 400 410
Fracture Toughness @ RT MPa*m¹/² 8 8 8
Max. Service Temp. (Air) °C 1900 1900 1900
Thermal Conductivity @ RT W/m*K 125.6 110 125.6
Primary Industrial Applications
  • Semiconductor Manufacturing: Diffusion, CVD, and high-temperature processing
  • LED Production: Epitaxial growth and wafer processing applications
  • Solar Energy: Photovoltaic cell diffusion furnace systems
  • Discrete Power Devices: Boron and phosphorus diffusion processes
Competitive Advantages
  • Quality Assurance: Rigorous quality control ensures consistent performance across all batches
  • Custom Engineering: Expertise in manufacturing components to precise customer specifications
  • Reliable Delivery: Efficient production systems designed to meet critical project timelines
  • Technical Support: Comprehensive application engineering and customer service
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High-Performance Silicon Carbide Furnace Components with Extreme Temperature Resistance, Superior Mechanical Strength, and Exceptional Thermal Management

Ask Latest Price
Price :
200-500 yuan/kg
Brand Name :
KEGU
Place of Origin :
China
Payment Terms :
L/C,D/A,D/P,T/T,,
Supply Ability :
2,000 pcs/month
Packaging Details :
Strong wooden box for Global shipping
Contact Supplier
High-Performance Silicon Carbide Furnace Components with Extreme Temperature Resistance, Superior Mechanical Strength, and Exceptional Thermal Management
High-Performance Silicon Carbide Furnace Components with Extreme Temperature Resistance, Superior Mechanical Strength, and Exceptional Thermal Management
High-Performance Silicon Carbide Furnace Components with Extreme Temperature Resistance, Superior Mechanical Strength, and Exceptional Thermal Management
High-Performance Silicon Carbide Furnace Components with Extreme Temperature Resistance, Superior Mechanical Strength, and Exceptional Thermal Management

Shaanxi KeGu New Material Technology Co., Ltd

Verified Supplier
2 Years
Shaanxi, tongchuan
Since 2017
Business Type :
Manufacturer, Trading Company
Certification Level :
Verified Supplier
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