| Parameter | Value |
|---|---|
| Degrees of Freedom | 6 axes |
| Payload Capacity | 4.5 kg |
| Maximum Reach | 670 mm (wrist) |
| Repeatability | ±0.02 mm (ISO 9283 |
| Cleanroom Classification | ISO 5 (Class 100) |
| Protection Rating | IP65 (IP67 with pressurized cabinet) |
| Compatible Cleaners | H₂O₂ (35-50%), IPA, ethanol, peracetic acid |