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High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
Specifications
Brand Name :
ZMSH
Certification :
rohs
Place of Origin :
China
MOQ :
5
Price :
100
Payment Terms :
T/T
Supply Ability :
1000per month
Delivery Time :
3-4 week
Packaging Details :
Foam Cushion + Carton box
Surface Resistance :
10⁴~10⁹Ω
Size :
Customizable (for 4–12 inch wafers)
Purity :
99.9%
Density :
D=8.91（g/cm3）
Diameter :
25-500 um
Application :
Package test, chip sorting
Mechanical Strength :
Flexural strength > 400 MPa
Resistivity :
0.1~60ohm.cm
Thermal Resistance :
1600 ℃
Chemical Resistance :
Resistant to acids, bases, and plasma
Description

Product Description:

Our SiC end effectors are designed for ultra-clean wafer handling in semiconductor manufacturing environments. Manufactured using high-purity silicon carbide, these forks provide exceptional thermal resistance, chemical stability, and mechanical strength—making them ideal for use in harsh process chambers such as etching, deposition, and high-temperature transport systems.

The dense, fine-grain SiC body ensures low particle generation, excellent dimensional stability, and compatibility with 200mm to 300mm wafers. Custom designs are available for specific robotic arms and wafer carriers.

Key Features:

  • Material: High-purity Silicon Carbide (SiC)

  • Excellent thermal resistance (up to 1600°C)

  • Superior chemical and plasma corrosion resistance

  • High mechanical strength and rigidity

  • Low particle generation for cleanroom use

  • Available for 4", 6", 8", and 12" wafer handling

  • Custom shapes and slots for robotic compatibility

Product Specifications:

Parameter Specification
Material High-purity SiC (≥99%)
Size Customizable (for 4–12 inch wafers)
Surface Finish Polished or matte per requirement
Thermal Resistance Up to 1600°C
Chemical Resistance Resistant to acids, bases, and plasma
Mechanical Strength Flexural strength > 400 MPa
Cleanroom Grade Suitable for Class 1–100

High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor ProcessingHigh Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor ProcessingHigh Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor ProcessingHigh Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor ProcessingHigh Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor ProcessingHigh Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing

Keywords / Tags:

#SiCEndEffector #WaferHandling #SiCFork #SemiconductorEquipment #WaferTransfer #HighPuritySiC #SiCWaferCarrier #SemiconductorAutomation #VacuumCompatible #SiCComponent #EtchingToolPart #RoboticWaferHandling

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High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing

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Product Detail
Brand Name :
ZMSH
Certification :
rohs
Place of Origin :
China
MOQ :
5
Price :
100
Payment Terms :
T/T
Contact Supplier
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing
High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork for Semiconductor Processing

SHANGHAI FAMOUS TRADE CO.,LTD

Verified Supplier
8 Years
shanghai, shanghai
Since 2013
Business Type :
Manufacturer, Agent, Importer, Exporter, Trading Company
Main Products :
Gallium Nitride Wafer, Sapphire Wafer, SiC Substrate
Total Annual :
1000000-1500000
Certification Level :
Verified Supplier
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