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4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing
4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing
4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing
4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing
4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing
4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing
Specifications
Brand Name :
ZMSH
Model Number :
4 Inch Quartz Wafer
Certification :
rohs
Place of Origin :
CHINA
MOQ :
10
Price :
by case
Payment Terms :
T/T
Supply Ability :
1000pcs per month
Delivery Time :
5-8weeks
Packaging Details :
Package in 100-grade cleaning room
Diameter :
4 inch (100mm)
Thickness Range :
0.5mm~1.5mm
Surface Roughness (Polished) :
≤0.5nm
Transmittance @193nm :
>93%
CTE (20-300°C) :
0.55×10⁻⁶/°C
Parallelism :
≤3μm
Description

Core Introduction of 4inch quartz wafer

​4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing

4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer for Semiconductor Manufacturing

The 4-inch quartz wafer (100mm) is a large-format, ultra-high-purity fused silica substrate designed for high-precision, high-stability applications in semiconductors, optoelectronics, and advanced optics. Compared to 3-inch wafers, the 4-inch specification offers significantly greater usable area, improving production efficiency—particularly for batch manufacturing of IC photomasks, high-power laser optics, and MEMS sensors.

ZMSH specializes in the R&D and production of 4-inch and larger quartz wafers, offering:

- Full-size customization: Supports 4-inch, 6-inch, and 8-inch wafers, with non-standard sizes (e.g., square, sector-shaped) available.

- High-precision processing: Includes double-side ultra-polishing (Ra≤0.5nm), laser dicing (±0.01mm tolerance), and micro-hole/special-shaped via drilling.

- Functional treatments: Anti-reflective (AR) coatings, IR anti-reflection, diamond-like carbon (DLC) coatings, and more.

- Industry-grade solutions: Semiconductor-level cleanliness (Class 10), low defect density (≤0.1/cm²), ideal for EUV lithography and quantum computing.

Specification for 4inch quartz wafer

Technical Term Specification
Diameter 4 inch (100mm)
Thickness Range 0.5mm~1.5mm
Surface Roughness (Polished) ≤0.5nm
Transmittance @193nm >93%
CTE (20-300°C) 0.55×10⁻⁶/°C
Parallelism ≤3μm
Vacuum Compatibility 10⁻¹⁰ Torr

​​Key Characteristics​​ of 4inch quartz wafer

1. Large-size precision: TTV≤10μm at 100mm diameter ensures process uniformity.

2. Ultra-low CTE: 0.55×10⁻⁶/°C, suitable for high-temperature processes (e.g., annealing, ion implantation).

3. Broadband transparency: >93% transmittance @193nm (DUV), >90% @3-5μm (IR).

4. Superior surface quality: Double-side polished with Ra≤0.5nm for nanoscale lithography.

5. Enhanced durability: Optional chemical strengthening boosts flexural strength to 600MPa; plasma-resistant.

​​Strategic Applications​ of 4inch quartz wafer

Field Applications
Semiconductor EUV lithography optics, photomask substrates, 3D NAND interposers
High-power Lasers Laser mirrors, pulse compression gratings, fiber laser endcaps
Quantum Technology Qubit chip carriers, cold atom trap viewports, single-photon detector substrates
Aerospace Satellite lenses, radiation-resistant sensor windows, particle detectors
Biomedical DNA sequencing chips, endoscope optics, microfluidic device molds

​​

Customization Services

ZMSH provides end-to-end customization for 4-inch quartz wafers, including:

- Material selection: JGS1/JGS2 UV-grade or IR-grade fused silica.

- Precision machining: Nanoscale polishing (λ/20), laser microstructuring (±1μm accuracy).

- Functional coatings: AR (193-1064nm), high-LIDT laser coatings (>5J/cm²).

- QA support: Full inspection reports (AOI, interferometry).

4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing

FAQ

1. Q: What is the typical thickness tolerance for 4-inch quartz wafers?

A: Standard 4-inch (100mm) quartz wafers maintain ±0.02mm thickness tolerance across the 0.5-1.5mm range, ensuring uniformity for semiconductor lithography processes.

2. Q: Why choose 4-inch over 6-inch quartz wafers for MEMS applications?

A: 4-inch wafers provide optimal cost-efficiency for small-to-medium MEMS production runs while maintaining better process control than smaller diameters.

Tag: #3 Inch Quartz Substrate, #Customized, #Fused Silica Plates, #SiO₂ Crystal, #Quartz wafers, #JGS1/JGS2 Grade, # High-Purity, #Fused Silica Optical Components, #Quartz Glass Plate, #Custom-Shaped Through-Holes​​, #4Inch Quartz Wafer, #Diameter 100mm, #Semiconductor Manufacturing

​​

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4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing

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Product Detail
Brand Name :
ZMSH
Model Number :
4 Inch Quartz Wafer
Certification :
rohs
Place of Origin :
CHINA
MOQ :
10
Price :
by case
Contact Supplier
4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing
4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing
4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing

SHANGHAI FAMOUS TRADE CO.,LTD

Verified Supplier
8 Years
shanghai, shanghai
Since 2013
Business Type :
Manufacturer, Agent, Importer, Exporter, Trading Company
Main Products :
Gallium Nitride Wafer, Sapphire Wafer, SiC Substrate
Total Annual :
1000000-1500000
Certification Level :
Verified Supplier
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