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3 Inch Quartz Substrate High Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS2
3 Inch Quartz Substrate High Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS2
3 Inch Quartz Substrate High Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS2
3 Inch Quartz Substrate High Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS2
3 Inch Quartz Substrate High Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS2
3 Inch Quartz Substrate High Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS2
Specifications
Brand Name :
ZMSH
Model Number :
3 Inch Quartz Wafer
Certification :
rohs
Place of Origin :
CHINA
MOQ :
10
Price :
by case
Payment Terms :
T/T
Supply Ability :
1000pcs per month
Delivery Time :
5-8weeks
Packaging Details :
Package in 100-grade cleaning room
Diameter :
3 inch (76.2mm)
Thickness Tolerance :
±0.02mm
Surface Roughness :
≤1nm (Polished Grade)
Transmittance @193nm :
>92%
CTE (RT-300°C) :
0.55×10⁻⁶/°C
Applications :
Semiconductor Manufacturing,High-power Lasers
Description

Product overview of 3inch quartz wafer

3 Inch Quartz Substrate High Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS2

3 Inch Quartz Substrate High-Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS2

​The 3-inch quartz wafer (76.2mm) is a large-format, high-purity fused silica substrate specifically designed for advanced semiconductor, optoelectronic, and precision optical applications requiring larger processing areas. Compared to 2-inch wafers, the 3-inch specification enhances production efficiency and reduces edge loss, making it particularly suitable for batch-manufactured MEMS devices, advanced photomasks, and laser optical systems.

ZMSH specializes in customized production of large-size quartz wafers, offering:

· Full Size Coverage: From 2-inch to 12-inch wafers, supporting non-standard size customization

· Complex Shape Processing: Round wafers, square plates, and special-shaped cuts (e.g., sector-shaped, D-cut)

· Multi-functional Surface Treatment: Single/double-side polishing, coatings (AR/IR/DLC), micro-structure etching

· Industry Solutions: Semiconductor-grade cleanliness (Class 100), laser drilling, high-precision alignment marks

Specification for 3inch quartz wafer

Parameter Specification
Diameter 3 inch (76.2mm)
Thickness Tolerance ±0.02mm
Surface Roughness ≤1nm (Polished Grade)
Transmittance @193nm >92%
CTE (RT-300°C) 0.55×10⁻⁶/°C
Parallelism ≤5μm
Vacuum Compatibility 10⁻⁹ Torr

​​Key Characteristics​​ of 3inch quartz wafer

3 Inch Quartz Substrate High Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS2

- Large-size Homogeneity: TTV≤15μm at 76.2mm diameter ensures process uniformity across large areas

- Deep UV Optimization: >92% transmittance at 193nm, supporting ArF lithography and DUV laser applications

- Thermal Shock Resistance: Thermal expansion coefficient 0.55×10⁻⁶/°C, withstands rapid temperature cycling (1000°C/min)

- Chemical-grade Inertness: Plasma erosion resistant, suitable for dry etching and CMP environments

- Mechanical Reinforcement: Optional chemical strengthening increases flexural strength by 300% to 500MPa

​​Core Applications​​ of 3inch quartz wafer

Field Specific Applications
Semiconductor Manufacturing Large-format photomask substrates, EUV lithography optics, 3D IC interposers
High-power Lasers Laser resonator mirrors, kW-level fiber laser end caps, ultrafast laser pulse compression grating substrates
Quantum Technology Qubit carrier wafers, cold atom chip vacuum viewports
Aerospace Satellite optical payload windows, radiation-resistant sensor protection covers
Biomedical Microfluidic chip masters, DNA sequencing chip substrates, endoscope light guides

Custom Quartz Prism Solutions

ZMSH provides quartz prism customization services for UV to IR wavelengths, including right-angle prisms, pentaprisms, and beam splitter prisms, featuring:

· Nanometer-level Surface Accuracy (λ/10@632.8nm)

· Special Coatings (laser damage-resistant coatings, polarizing beam splitter coatings)

· Integrated Processing (prism-wafer hybrid structures, microchannel cooling designs)

Ideal for cutting-edge applications in laser beam shaping, spectral analysis, and high-energy physics experiments.

3 Inch Quartz Substrate High Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS23 Inch Quartz Substrate High Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS2

FAQ

1. Q: What are the advantages of 3-inch quartz wafers over smaller sizes?

A: 3-inch (76.2mm) quartz wafers provide 44% more usable area than 2-inch wafers, reducing edge loss and increasing throughput for MEMS manufacturing and optical coating processes.

2. Q: How to handle and store 3-inch fused silica wafers properly?

A: Always use cleanroom-grade wafer carriers with edge-contact supports, and store in Class 100 environments with <40% RH to prevent surface contamination and moisture absorption.

Tag: #3 Inch Quartz Substrate, #Customized, #Fused Silica Plates, #SiO₂ Crystal, #Quartz wafers, #JGS1/JGS2 Grade, # High-Purity, #Fused Silica Optical Components, #Quartz Glass Plate, #Custom-Shaped Through-Holes​​, #3 Inch Quartz Substrate, #76.2mm Diameter

​​

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3 Inch Quartz Substrate High Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS2

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Product Detail
Brand Name :
ZMSH
Model Number :
3 Inch Quartz Wafer
Certification :
rohs
Place of Origin :
CHINA
MOQ :
10
Price :
by case
Contact Supplier
3 Inch Quartz Substrate High Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS2
3 Inch Quartz Substrate High Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS2
3 Inch Quartz Substrate High Purity Fused Silica Wafer 76.2mm Diameter JGS1/JGS2

SHANGHAI FAMOUS TRADE CO.,LTD

Verified Supplier
8 Years
shanghai, shanghai
Since 2013
Business Type :
Manufacturer, Agent, Importer, Exporter, Trading Company
Main Products :
Gallium Nitride Wafer, Sapphire Wafer, SiC Substrate
Total Annual :
1000000-1500000
Certification Level :
Verified Supplier
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